Abstract:The method for designing diffractive microlens with micro-nano-scale structural features, through iterative angular spectrum algorithm, and fabricating diffractive microlens by single-step photolithography and a wet etching process, based on standard micro-nano-technology, was presented. Surface morphology testing shows that the diffractive microlens fabricated is composed of multi-step continuous relief structures with the feature height in the micrometer range, the distribution of the surface micro-nano-structures is circular symmetry, and the transition between the circular rings is smooth. A large number of fine structures with micro-nano-scale features can be clearly observed in the scanning electron microscope on the surface of the diffractive microlens. Surface roughness data tested shows that the surface roughness of fabricated diffractive microlens is in the nanometer range, which has reached the level of optical mirror. The optical aperture is in the micrometer range. The characteristics of the micro-structures on the surface and the optical aperture can be set and arranged flexibly by the iterative angular spectrum algorithm, according to the characteristics and parameters of the incident and outgoing beam. The results of optical characteristics measurement show that the diffractive microlens can focus incident red laser into a very small bright focal spot, and the phenomenon of focusing and defocusing is obvious. The analysis of beam quality shows that the intensity distribution and size of the focal-spot is in accord with pre-calculated results. The fabricated diffractive microlens indicates a very high diffraction efficiency. The experimental results demonstrate that the performances of the diffractive microlens can be further improved by modifying the design algorithm and optimizing the manufacture craft.

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Microfabrication of Microlens Array by Focused Ion Beam Technology

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Investigation of Integrated Diffractive/Refractive Microlens Microfabricated by Focused Ion Beam

Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Microfabrication Of Diffractive Optical Element With Continuous Relief By Focused Ion Beam

Investigation Of Microlens Mold Fabricated By Focused Ion Beam Technology

One-Step Maskless Microfabrication of Hybrid Microlens by Use of Focused Ion Beam Directly Milling

Experimental study of microcylindrical lenses fabricated using focused-ion-beam technology

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Optical Nanofabrication of Concave Microlens Arrays

Design and Fabrication of Diffractive Microlens Arrays with Continuous Relief for Parallel Laser Direct Writing.

Integration of Micro-Optical Elements with Top-End of Fibers Via Focused Ion Beam Direct Fabrication

Semiconductor Microlenses Fabricated by One-Step Focused Ion Beam Direct Writing

Investigation of Diffractive Optical Element with Continuous Relief and Submicron Feature Size for Fiber Coupling

Integration of Microdiffractive Lens with Continuous Relief with Vertical-Cavity Surface-Emitting Lasers Using Focused Ion Beam Direct Milling

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

Investigation of Diffractive Optical Element Fabricated on Diamond Film by Use of Focused Ion Beam Direct Milling

Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

Investigation of Single Mode Fiber Coupling Using Diffractive Optical Element with Continuous Relief Fabricated by Focused Ion Beam Technology