Abstract:Advantages of focused ion beam (FIB) technology in micromachining are high feature resolution, capable of maskless processing, rapid prototyping, and adaptive for various materials and geometries. FIB was extensively used to fabricate a variety of microtools for ultraprecision machining and micromachining with typical dimensions ranging from 10 to 40 μm and a curvature radius of 25 nm or even smaller. The microtools with controlled geometries, such as arc and sawtooth shapes, were shaped using FIB milling technique corresponding to different cutting requirements. The FIB milling is able to shape desired tool geometries with microscale features by means of controlling suitable ion beam parameters and precise orientation of the tools with respect to projection direction of ion beam. The cutting microtools used here are made from hard alloy. Testing experiments were carried out using a microtool with arc-shaped cross section to machine concentric rings and an annular plane in planar metal workpiece. Another microtool with sawtooth-shaped cross section was used to fabricate microdiffractive optical elements. The machining results demonstrated that the FIB-fabricated microtools can accurately machine desired microstructures. This fabrication method shows significant advantages of higher precision and lower cost than that of the conventional tool lapped finishing methods. It is promising to be an effective method for fabricating the microtools with complex shapes.

Investigation Of Microlens Mold Fabricated By Focused Ion Beam Technology

Novel One-Step Method of Microlens Mold Array Fabrication

Experimental study of microcylindrical lenses fabricated using focused-ion-beam technology

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Investigation of Integrated Diffractive/Refractive Microlens Microfabricated by Focused Ion Beam

Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Laser and focused ion beam combined machining for micro dies

Microfabrication of Microlens Array by Focused Ion Beam Technology

Advances of Focused Ion Beam in Micromachining Technology

Fabrication of a Micro-Lens Array Mold by Micro Ball End-Milling and Its Hot Embossing

Investigation of 3D microfabrication characteristics by focused ion beam technology in silicon

Development of a laser-focused ion beam combination machine

Fabrication of Micro and Nanostructures by Focused Ion Beam

FIB Etching of Glass-Like Carbon Die and Mold Press of Micro Glass Lens

Controlled Morphology of Microtools Shaped Using Focused Ion Beam Milling Technique

One-Step Maskless Microfabrication of Hybrid Microlens by Use of Focused Ion Beam Directly Milling

Picosecond Laser Interference Patterning of Periodical Micro-Architectures on Metallic Molds for Hot Embossing

Experimental Study of Three-Dimensional Microfabrication by Focused Ion Beam Technology

Study on New Method and Mechanism of Microcutting-Etching of Microlens Array on 6H-Sic Mold by Combining Single Point Diamond Turning with Ion Beam Etching

Semiconductor Microlenses Fabricated by One-Step Focused Ion Beam Direct Writing

Fabrication of Three-Dimensional Microstructures by Two-Dimensional Slice by Slice Approaching Via Focused Ion Beam Milling