Abstract:A non-null aspheric surface testing system using a quadriwave lateral shearing interferometer (QWLSI) based on the randomly encoded hybrid grating is proposed. The system uses a non-null lens to partially compensate for the longitude aberration of the aspheric surface, which is more versatile than the null configuration. QWLSI is a common-path and self-reference system and requires no reference surface. Compared with the conventional Twyman–Green interferometer (TGI), QWLSI has higher dynamic range, better antivibration ability, and higher stability. For a non-null testing system based on the QWLSI and TGI, the compensation ranges of different aspheric surfaces and the allowable range of aspheric axial positions are analyzed under the condition that the interference fringe satisfies the Nyquist sampling theorem. The iterative reverse optimization retrace error-correction algorithm based on the exact system modeling and the localization algorithm of aspheric axial position are discussed. Simulation results show that the root mean square value of the aspheric surface reconstruction residual is less than 1/200λ, which indicates that the system has extremely high theoretical testing accuracy. In the experiment, the QWLSI non-null system and the autocollimation null method with a ZYGO interferometer agree with the testing results of the same aspheric surface, which demonstrates the feasibility and accuracy of the QWLSI aspheric non-null testing method.

Alignment Error for Aspheric Surfaces Monnull Stitching Testing

Elimination of reference surface error on high-accuracy subaperture stitching

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Alignment error model of subaperture stitching interferometry for aspheric surface based on wavefront aberrations

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Aspheric Subaperture Stitching Based on System Modeling.

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Novel Algorithm for Compensating Misalignment in Optical Spherical Surface Testing

Retrace Error Correction for Non-Null Testing of Optical Aspheric Surface

Alignment Methods for Micron-Scale Surface Defects Automatic Evaluation of Large-Aperture Fine Optics

Model analysis of sub-aperture stitching interferometry for aspheric surface test

Error Analysis Of Spherical Ultra-Precision Measurement

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Non-null interferometric aspheric testing with partial null lens and reverse optimization

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Study of annular sub-aperture stitching interferometry for aspheric surfaces

Revising Model for the Bias Errors Correcting During Stitching Measure Aspheric Surface

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing