The Micro-displacement Detecting System Design of a Micromachined Electrostatically Suspended Gyroscope

XIAO Qi-jun,CHEN Wen-yuan,CUI feng,Li Sheng-yong,HUANG Xiao-gang,SHAO Dang-dang
DOI: https://doi.org/10.3969/j.issn.1009-9492.2009.05.024
2009-01-01
Abstract:In order to realize the measurement of the five-degree-of-freedom of the rotor for a kind of micomachined electrostatically suspended gyroscope, a micro-displacement detection principle is raised. The detection system mainly includes the multi-frequency signal generator, front amplifier and lock-in amplifier. A multi-frequency signal generator is designed based on the DDS technology and a demodulation circuit based on the lock-in amplifier theory. The experiment and analysis results indicate that the circuit could realize multi-freedom measurement of the rotor. The multi-frequency signal generator’s frequency resolution can reach 0.005821Hz and the phase resolution can reach 0.006rad.The axial direction detection sensitivity is 1.34V/?m and the radial direction detection sensitivity is 0.092V/?m.The axial detection resolution of the circuit is 0.45nm, the radial detection resolution is 6.6 nm and the rotate angle’s resolution is 0.25?rad. The resolution, sensitivity and linear detecting range can satisfy the requirements of the control system.
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