Interfacial Reaction of W/Cu Examined by an N-Body Potential Through Molecular Dynamics Simulations

LT Kong,XY Li,WS Lai,JB Liu,BX Liu
DOI: https://doi.org/10.1143/jjap.41.4503
IF: 1.5
2002-01-01
Japanese Journal of Applied Physics
Abstract:Concerning the possible barrier function of W in the case of Cu metallization technology, the interfacial reaction between the equilibrium immiscible Cu and W was studied by molecular dynamics simulations, based on a proven realistic Cu–W potential derived under the embedded atom method. The simulation results revealed that the Cu (W) atoms did not diffuse into the W (Cu) lattice within a temperature range of 300–900 K. Moreover, even a disordered interlayer was preset at the Cu–W interface, mutual diffusion was not detectable and the disordered interlayer did not expand either, while it was reported to occur in the Ta/Cu bilayer at around 450–600°C.
What problem does this paper attempt to address?