Effect of Nb-doping on the Structure, Magnetic, and Mechanical Properties for Fe–N Films Synthesized by Facing-Targets Magnetron Sputtering

N. Ma,W. T. Zheng,X. Wang,L. L. Wang
DOI: https://doi.org/10.1016/j.jallcom.2008.11.001
IF: 6.2
2008-01-01
Journal of Alloys and Compounds
Abstract:Fe–Nb–N films (Nb content: 10 and 25at.%, respectively) were prepared on Si (100) substrates by facing-targets magnetron sputtering, and the structure, magnetic, and mechanical properties of as-deposited and annealed Fe–Nb–N films were explored using X-ray diffraction, SQUIDS magnetometer and nanoindentation. It was found that the annealed Fe–Nb–N film with Nb content of 10 at.% was composed of a α-Fe phase, and Nb-doping improved both the magnetic and mechanical property of Fe–N film, in which the value of saturation magnetization, coercivity, and hardness for Fe–Nb–N film was 193emu/g, 9Oe, and 12GPa, respectively. Also, it was found that as Nb content increased to 25 at.%, the hardness for Fe–Nb–N film increased up to 16.7GPa.
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