Structural and Magnetic Properties of FeCoN Thin Film Deposited by Facing-Target Magnetron Sputtering

JIA Hui,HAN Li,SUN Shu-jing,SUN Guang-dong,ZHAO Cui-mei,WANG Xin
DOI: https://doi.org/10.13413/j.cnki.jdxblxb.2011.01.026
2011-01-01
Abstract:Fe-Co-N films were deposited on an unheated Si(111) substrate by means of developed facing-target magnetron sputtering with N2/Ar as sputtering gas.The effect of various Co target power on the structure,morphology and magnetic properties of FeCoN films were investigated by X-ray diffraction(XRD),transmission electron microscopy(TEM),scanning electron microscopy(SEM) and superconducting quantum interference device(SQUID),respectively.The results show that when the input power on Fe target was 160 W and Co target power was 2.4 W,the thin films with e-(Fe,Co)3N were synthesized;when Co target power was 58 W,paramagnetic Co3N phase appeared with ferromagnetic phase Fe3N,saturation magnetization(Ms) of thin film is 151.47 A·m2/kg,coercivity(Hc) is 3.68 kA/m.When Co target power was 11.9 W(I=0.07 A),α″-(Fe,Co)16N2 phase was obtained with a high Ms of 265.08 A·m2/kg and Hc of 8.24 kA/m.
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