Microstructural Evolution of Metallorganic Derived Pt-doped TiO2

Hayakawa Issei,Iwamoto Yuji,Kikuta Ko-ichi,Hirano Shin-ichi
DOI: https://doi.org/10.1557/jmr.2000.0399
2000-01-01
Abstract:A metalorganic precursor containing Ti and Pt was synthesized using Ti alkoxide derivative, amino acid, and platinum salt. The decomposition behavior of the precursor and thin-film formation were examined in terms of microstructure evolution and crystallization. The precursor yielded anatase at 400 °C. Grain growth of platinum particles and TiO2 grains was suppressed even at 800 °C in the films. Suppression of grain growth was attributed to an effect of film thickness.
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