Abstract:A 3PRR parallel precision positioning system, driven by three ultrasonic linear motors, was designed for use as the object stage of a scanning electron microscope (SEM). To improve the tracking accuracy of the parallel platform, the positioning control algorithms for the drive joints needed to be studied. The dead-zone phenomenon caused by static friction reduces the trajectory tracking accuracy significantly. Linear control algorithms such as PID (Proportion Integration Differentiation) are unable to compensate effectively for the dead-zone nonlinearity. To address this problem, two types of feedforward compensation control algorithms have been investigated. One is constant feedforward with the integral separation PID; the other is adaptive feedback and feedforward based on the model reference adaptive control (MRAC). Simulations and experiments were conducted using these two control algorithms. The results demonstrated that the constant feedforward with integral separation PID algorithm can compensate for the time-invariant system after identifying the dead-zone depth, while the adaptive feedback and feedforward algorithm is more suitable for the time-varying system. The experimental results show good agreement with the simulation results for these two control algorithms. For the dead-zone nonlinearity caused by the static friction, the adaptive feedback and feedforward algorithm can effectively improve the trajectory tracking accuracy.

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