Abstract:Ultrasonic motors (USMs) are widely used in many applications where precise and fast motions are required, such as precision machines and medical devices, etc. In this paper, an USM-driven X-Y stage is investigated. Several issues arise for the precision motion control of the stage, such as the nonlinearities of USMs and the coupling effects in the multi-DOF configuration. To address these challenges, an intelligent controller consisting of a cerebellar model articulation controller (CMAC) and a sliding mode compensator (SMC) is designed. Therein, the CMAC is employed due to its fast learning ability while the SMC is used to compensate the approximation error between the CMAC and the desired compensation controller. To further accelerate the error convergence, a Proportional-Integral-Derivative (PID) controller is designed for each USM. Due to the decentralized control structure, a constrained Linear-Quadratic (LQ) optimization algorithm is employed to optimize the PID controller gains. In this way, a control scheme combining the optimal PID controllers with the intelligent controllers is developed. Lastly, several experiments are carried out to verify and validate the effectiveness of the proposed control scheme.

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