Abstract:In order to provide the actuating torque and electrical power for the micro-robot operating in the sealed and harsh environment, an energy-recycling type ultrasonic motor (USM) was developed according to the frequency automatic tracking principle of the stator isolated electrode of traveling wave type USM. Compared with the traditional USM, the proposed USM not only has driving function, but also has the function of harvesting the vibration energy and converting it into the electrical power. The polarization pattern of the piezoelectric ceramic (PZT) was modified according to the operating principle of the energy-recycling type USM. The PZT was divided into three sectors, namely exciting sector, the energy harvesting sector and the sensor sector (or isolated sector), respectively. The mechanical vibration energy of the USM stator was harvested by the energy harvesting sector PZT by using the piezoelectric effect. The theoretical model of the vibration energy harvester of the USM stator was derived based on the Timoshenko beam theory and the piezoelectric equation. Consequently, the impedance match of the energy harvesting sector of PZT was analyzed. The effects of the exciting frequency, exciting voltage and resistance load of the USM on the output voltage, output current and output power of the energy harvesting sector of PZT were analyzed based on the model. Experiments were conducted to test the validities of the simulation results.

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