STEPPING CHARACTERISTIC OF ULTRASONIC MOTOR AND ITS STEPPING-POSITIONING CONTROL

纪科辉,郭吉丰,刘晓
DOI: https://doi.org/10.3321/j.issn:0258-8013.2004.01.014
2004-01-01
Abstract:Ultrasonic motor is difierent from traditi- onal electromagnetic motor and it is driven bv friction force.It is characterized by rapidly dynamic perfor- mance and high resolution.Based on its character,this paper introduces a precise position control metho- d.Firstly,the paper points out the essentials of high resolution and stepping characteristic of ultrasonic motor in theory and experiment.Next,based on this characteristic of the motor,the paper discusses high precise position control strategy named stepping- position control method and the factors that influence position precision are analyzed.By the stepping- position control method,high precise position control (0.010°) have been realized by the experimental hybrid transducer type ultrasonic motor,which demonstrates its potential for driving high precise mechanical system,such as MEMS.
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