Size And Boundary Effect In Ferroelectric Thin Film For Integrated Passive Components For Rf Communication

NINGXIN ZHANG,YI YANG,YIPING ZHU,TIANLING REN,LITIAN LIU

DOI: https://doi.org/10.1080/10584580500414382

2005-01-01

Integrated Ferroelectrics

Abstract:PZT thin film was fabricated into integrated capacitors via chemical solution deposition and standard IC process. The integrated capacitors with different top electrode area and configurations including central part and boundary part were processed, and the influences of cell size and boundary configuration on ferroelectric properties and specific capacitance were investigated. In the center part the specific capacitance of the integrated capacitor was more sensitive to the cell size than that in the boundary part, and the maximal specific capacitance was reached in the medium cell size. The specific capacitance showed a nonlinear relationship with electrode area and electrode circumference, which could serve as a guide for the optimization design of integrated capacitors.