Survey on MEMS Micromotor
戴福彦,张卫平,陈文元,刘凯,马高印,肖奇军,张忠榕
DOI: https://doi.org/10.3969/j.issn.1001-6848.2009.08.018
2009-01-01
Abstract:Introduced the essential principle,construction,parameter of electrets micromotor,corona micromotor,reluctance micromotor,permanent magnetic micromotor,piezoelectric ultrasonic micromotor,molecular micromotor and nanomotor.Described research situation,development prospect and the application at home and abroad in this paper.