Design, Fabrication and Applications of Electromagnetic Micromotor

高杨,赵小林,陈文元,张琛

DOI: https://doi.org/10.3969/j.issn.1672-2892.2003.03.017

2003-01-01

Abstract:Research and development achievements on electromagnetic micromotor by Shanghai Jiao Tong University are summarized in the paper, including its structural design, electrical control and microfabrication techniques.

What problem does this paper attempt to address?

An Axial Flux Electromagnetic Micromotor

CS Yang,XL Zhao,GF Ding,C Zhang,BC Cai

DOI: https://doi.org/10.1088/0960-1317/11/2/305

2001-01-01

Journal of Micromechanics and Microengineering

Abstract:In this paper, the principle, design, fabrication and performance of an axial flux electromagnetic micromotor are described. The stator of the micromotors consists of six levels of copper windings and an alumina filling using a modified LIGA (Lithographic Galvanoforming Abforming)-like technology. The rotor is a disc made of SmCo permanent magnetic alloy using the electro discharge machining (EDM) technique and it is magnetized with pairs of magnetic poles using a specially designed apparatus. The rotor and the stator are assembled together to form the micromotor. The dimensions of the assembled motors are 1 mm and 2 mm in diameter and about 1.5 mm thick. The rotation speed of the micromotors can be adjusted from several hundreds to over ten thousand rpm and the rotation is reversible. The output torques of the micromotor are measured to be 1.5 µN m and 2.8 µN m for motors with diameters of 1 mm and 2 mm, respectively.
Survey on MEMS Micromotor

戴福彦,张卫平,陈文元,刘凯,马高印,肖奇军,张忠榕

DOI: https://doi.org/10.3969/j.issn.1001-6848.2009.08.018

2009-01-01

Abstract:Introduced the essential principle,construction,parameter of electrets micromotor,corona micromotor,reluctance micromotor,permanent magnetic micromotor,piezoelectric ultrasonic micromotor,molecular micromotor and nanomotor.Described research situation,development prospect and the application at home and abroad in this paper.
Review on Development of Micromotor

李翠萍,柴凤,宫海龙,程树康

DOI: https://doi.org/10.3969/j.issn.1004-7018.2009.04.019

2009-01-01

Abstract:Micromotor has become a hot topic which more and more scholars study on due to the demands of motor miniaturization,low speed and high precision etc.The principle,development status and application of various micromotors were summanized,and the advantages and disadvantages of different micromotors were analyzed in detail and compared.The research and optimization of micromotor is of great importance for medicine,aerospace,robot fields.
Effects of structure, Gap Magnetic Field and Winding layers of Micromotor on It's Output Torque

杨春生,丁桂甫,赵小林,张琛,余晋岳

2001-01-01

Abstract:Electromagnetic micromotor is an ideal micro actuator for MEMS,micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications. The effects of structure, gap magnetic field, rotor thickness, magnetic pole numbers of rotor and winding layers of stator of the micromotor on it's output torque are discussed in detail.
Microfabrication Process Study for Stator Winding of Electromagnetic Micromotor

XL Zhao,BC Cai,CS Yang,C Zhang

DOI: https://doi.org/10.1117/12.408401

2000-01-01

Abstract:The micro-fabrication process for electromagnetic micro-motor stator winding, including adopting of new insulating material such as polyimide, is discussed in present study. A diameter of 2 mm electromagnetic micro-motor after adopting the new micro-fabrication process improves its performance. The motor output torque is 25% higher than before, and the operating temperature can reach 180 degreesC. Two examples of practical usage of micro-motor made by new process are given.
Development and Application of Millimeter Piezoelectric Micro Motor

ZHOU Tie-ying,LU Cun-yue,CHEN Yu

DOI: https://doi.org/10.3969/j.issn.1004-7018.2005.12.014

2005-01-01

Abstract:There is a increasing interest on millimeter piezoelectric micro-motors.However,its application is limited due to the complex construct of electromagnetic motors and a little output power of electrostatic motors.Piezoelectric motors are promising because of the unique advantages on simple construction and high power density.The development state,key technology,application fields and future of micro motor for diameter less than 10 millimeter are introduced in this paper.
Numerical and experimental investigations on the influence factors of diamagnetic levitated electrostatic motor

Yuanping Xu,Riwang Ling,Jarir Mahfoud,Lu Yang,Jin Zhou

DOI: https://doi.org/10.1007/s40430-024-05047-x

IF: 2.361

2024-06-24

Journal of the Brazilian Society of Mechanical Sciences and Engineering

Abstract:The friction issue induced by scale reduction has been a challenge for the development of conventional micromotor. With the inherent merits of friction-free and self-passive stabilization, diamagnetic levitation emerges as a promising approach to tackle this friction issue. In this paper, a micromotor based on diamagnetic levitation and electrostatic drive technologies is developed. The driven model of micromotor is established, and a systematical investigation is performed to analyze the effects of influencing parameters on the motor from both theoretical and experimental perspectives. To improve the performance of micromotor, the structural parameters are also optimized in stable operating condition. With the optimized structural parameters, the motor can reach a speed lower than 300 rpm and the required excitation voltage was reduced from 700 to 400 V. This work is a first step in a research program aiming at the optimization of diamagnetic levitated rotor by increasing the performances and reducing its energy consumption. The proposed model reveals that the influence laws of factors can also be extended to study other high-performance micromotors, though it also identifies certain limitations that should be addressed in future research.

engineering, mechanical
Nano/Micro Motor and Its Progress in Fabrication and Applications

董任峰,任碧野

2013-01-01

Abstract:The nano/micro motor is a movable device with the size of nanometer or micrometer, and has some special functions or can carry out some tasks in micro-system. The nano/micro motor has been a significant and cutting-edge research field in nano-engineering due to its great potential in chemistry, environment and biomedicine. Recent years, great progress has been achieved in the field of nano/micro motors, especially in fabrication and application. Based on the understanding of the behaviour principle of different nano/micro motors, various of low cost and easy methods have been established. Different shape and functional nano/micro motors have been created also. The application of nano/micro motors in material recognition, protein delivery, DNA identification, captruing of cancer cell, isolation of becterium and disposing of oily water were reported subsquently, which is attracting scientists'great interest. Now, how to control the movment of various motors precisely to accomplish complicated task in micro-system is a trend of the reasearch of nano/micro motor. In this review, a cimperohensive introduction to nano/micor motors including their type, working princinple, primary fabrication methods and applications in various filed are given in order to promote the development of nano/micor motors in the future in China.
Multi-functional micromotor: microfluidic fabrication and water treatment application.

Anqi Chen,Xue-Hui Ge,Jian Chen,Liyuan Zhang,Jian-Hong Xu

DOI: https://doi.org/10.1039/c7lc00950j

IF: 7.517

2017-01-01

Lab on a Chip

Abstract:Micromotors are important for a wide variety of applications. Here, we develop a microfluidic approach for one-step fabrication of a Janus self-propelled micromotor with multiple functions. By fine tuning the fabrication parameters and loading functional nanoparticles, our micromotor reaches a high speed and achieves an oriented function to promote the water purification efficiency and recycling process.
State-of-the-Art Lightweight Implementation Methods in Electrical Machines

Han Zhao,Jing Li,Xiaochen Zhang,Bin Xiong,Chenyi Zhao,Yixiao Ruan,Huanran Wang,Jing Zhang,Zhouwei Lan,Xiaoyan Huang,He Zhang

DOI: https://doi.org/10.3390/machines12050339

IF: 2.899

2024-01-01

Machines

Abstract:The demand for high-power density motors has been increasing due to their remarkable output capability and compact construction. To achieve a significant improvement in motor power density, lightweight design methods have been recognized as an effective enabler. Therefore, extensive investigations have been conducted to reduce motor mass and achieve lightweight configurations through the exploration of lightweight materials, structures and manufacturing techniques. This article provides a comprehensive review and summary of state-of-the-art lightweight implementation methods for electrical machines, including the utilization of lightweight materials, structural lightweight design, and incorporation of advanced manufacturing technologies, such as additive manufacturing techniques. The advantages and limitations of each approach are also discussed in this paper. Furthermore, some comments and forecasts on potential future methodologies for motor lightweighting are also provided.
Development of Miniaturized Piezoelectric Ultrasonic Motor

褚祥诚,李龙土

DOI: https://doi.org/10.3969/j.issn.1004-2474.2001.04.010

2001-01-01

Abstract:This paper summarizes main research achievements on micro piezoelectric ultrasonic motors in China and abroad,and compares advantage and disadvantage among themThe author presents several suggestions on the development of micro piezoelectric ultrasonic motors
Recent advancements in Mg-based micromotors for biomedical and environmental applications

Yue Wang,Boyu Qin,Sihan Gao,Xuanchun Wang,Hongyue Zhang,Zhiguang Wu,yue wang

DOI: https://doi.org/10.1039/d3tb02339g

IF: 7.571

2023-01-01

Journal of Materials Chemistry B

Abstract:Synthetic micro/nanomotors have attracted considerable attention due to their promising potential in the field of biomedicine. Despite these great potentials, the propulsions of major micromotors requires chemical fuels or complex...

materials science, biomaterials
Recent Development and Prospect of Multi-Degree-of-freedom Ultrasonic Motors

GUO Ji-feng,BAI Yang,WANG Jian

DOI: https://doi.org/10.3969/j.issn.1000-3835.2013.15.001

2013-01-01

Abstract:Ultrasonic motors(USM) have the advantages of low speed,high torque,quick response,high resolution and anti-electromagnetic interference capability,which bring them broad application prospect in fields of robots,industrial instruments and security technologies.Multi-degree-of-freedom(MDOF) motor is one of the most cutting-edge aspects in the ultrasonic motor researches.Several typical MDOF ultrasonic motors of different types were introduced.The structure,working principle and characteristics were mainly discussed.Some typical examples were given and the key achievements were summarized,as well as their applications.The research and development trends were proposed.
Synthesis of a micro motor actuated by remote resonant magnetic fields

Kai Xu,Jiangran Zhao,Guoqing Liu

DOI: https://doi.org/10.1109/ICInfA.2013.6720319

2013-01-01

Abstract:It is believed that micro actuators and robots might introduce revolutionary changes in many advanced applications, such as nano manipulation and minimally invasive medicine. Many prototypes were recently developed, which could be powered either by micro organism, by onboard mechatronic systems or by remote magnetic fields. This paper presents two evolving designs, aiming at producing a micro motor which can be selectively remotely actuated by weak resonant magnetic fields. The core design concept is to design a spring-mass structure to transform the vibrations of a soft magnet into rotary outputs. The generated rotation can then be used to form revolute joints or to drive propellers. The proposed designs convert magnetic energy directly into mechanical work, avoiding complex components from tradition motor units such as windings, batteries, etc.
Micro Electromagnetic Actuator For Micropump

Ql Gong,Zy Zhou,Yh Yang

1999-01-01

Abstract:The paper presents the structure design of a micro electromagnetic micropump as well as its actuator. Based upon theoretical mechanics modeling and numerical calculation, micro actuator's mechanical structure and electromagnetic force were figured out. Some optimizations were also investigated in the paper.
The Study of an Electromagnetic Levitating Micromotor for Application in a Rotating Gyroscope

Weiping Zhang,Wenyuan Chen,Xiaolin Zhao,Xiaosheng Wu,Wu Liu,Xiaogang Huang,Shiyi Shao

DOI: https://doi.org/10.1016/j.sna.2006.03.002

IF: 4.291

2006-01-01

Sensors and Actuators A Physical

Abstract:An electromagnetic micromotor with alumina rotor, which is stably levitated, rotated, sensed and controlled by independent coils and capacitance structure, is presented. Levitated force with lateral stability is produced by the electromagnetic interaction between the rotor and four groups of levitation planar coils with inter and outer conductors carrying opposite phase high frequency AC current. The rotation is realized by a four-phase induction micromotor composed of the rotor and eight rotation planar coils carrying AC current. Eight pieces of sector sense electrode and the rotor constructed a no contact capacitance displacement sense system. The torque returning the rotor to its equilibrium position is produced by four groups of planar coils. The prototype device with the rotation speed of 3035rpm, the levitation height of 200μm and factor scale of 0.212V/°, has been designed, fabricated, tested successfully. The study illustrates that the micromotor can be applied in a rotating gyroscope.
Novel Microstepping Control Methods for Electromagnetic Micromotors with Star-Connected Winding

Zhenbo Li,Jiapin Chen,Xiang Ge,Chen Zhang

DOI: https://doi.org/10.1016/j.sna.2006.05.039

2007-01-01

Abstract:This paper presents two novel microstepping control methods specially designed for electromagnetic micromotors with star-connected winding. The details of the micromotor structure are described. Two microstepping methods, virtual coil and torque-synthesis current division methods, have been developed to realize the accuracy position precision control. Electrical design instead of mechanical design is adopted to overcome the present difficulty in machining a micro stepper motor. Some initial results in the real microrobot system which driven by the electromagnetic micromotor are given to show the performance of these methods.
Research on Micromachining Process of Micromachined Gyroscope with Electromagnetically Levitated Rotor

吴校生,陈文元,赵小林,张卫平,何淼

2004-01-01

Abstract:Depending on the characteristics of small volume,light weight and low price, the micromachined gyroscope is coming into people's daily life. Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind one,which is based on working mechanism of conventional gyroscope. High resolution is hopeful to be obtained in MGELR. The micromachining technique of MGELR provides the important base for its structure design.Stator of MGELR is obtained through photolithography,electroplate and sputtering deposition.The measuring result shows that the processing methods can get planar coil with high quality.Punch or evaporation can be used to fabricate microrotor,and for both methods,the punch can get microrotor with better quality.Preliminary experiment showed that this micromachining process scheme is feasible.
Geometry Design, Principles and Assembly of Micromotors

Huanpo Ning,Yan Zhang,Hong Zhu,Andreas Ingham,Gaoshan Huang,Yongfeng Mei,Alexander A. Solovev

DOI: https://doi.org/10.3390/mi9020075

IF: 3.4

2018-01-01

Micromachines

Abstract:Discovery of bio-inspired, self-propelled and externally-powered nano-/micro-motors, rotors and engines (micromachines) is considered a potentially revolutionary paradigm in nanoscience. Nature knows how to combine different elements together in a fluidic state for intelligent design of nano-/micro-machines, which operate by pumping, stirring, and diffusion of their internal components. Taking inspirations from nature, scientists endeavor to develop the best materials, geometries, and conditions for self-propelled motion, and to better understand their mechanisms of motion and interactions. Today, microfluidic technology offers considerable advantages for the next generation of biomimetic particles, droplets and capsules. This review summarizes recent achievements in the field of nano-/micromotors, and methods of their external control and collective behaviors, which may stimulate new ideas for a broad range of applications.
Optimization of /spl Phi/1 Mm Permanent Magnet Axial-Field Micromotor

Mingsheng Zhang,Bingchu Cai,Chunsheng Yang

DOI: https://doi.org/10.1109/intmag.2002.1001506

2003-01-01

Abstract:Summary form only given. Because of the small dimension of micromachined devices, they show some characteristics that are different from normal devices. In order to optimize the structure of a /spl Phi/1 mm permanent magnet axial-field motor, the effects of air gap width, thickness of rotor, number of layers of windings, and number of magnetic poles in the rotor on the output torque are analyzed in this paper.

Design, Fabrication and Applications of Electromagnetic Micromotor

An Axial Flux Electromagnetic Micromotor

Survey on MEMS Micromotor

Review on Development of Micromotor

Effects of structure, Gap Magnetic Field and Winding layers of Micromotor on It's Output Torque

Microfabrication Process Study for Stator Winding of Electromagnetic Micromotor

Development and Application of Millimeter Piezoelectric Micro Motor

Numerical and experimental investigations on the influence factors of diamagnetic levitated electrostatic motor

Nano/Micro Motor and Its Progress in Fabrication and Applications

Multi-functional micromotor: microfluidic fabrication and water treatment application.

State-of-the-Art Lightweight Implementation Methods in Electrical Machines

Development of Miniaturized Piezoelectric Ultrasonic Motor

Recent advancements in Mg-based micromotors for biomedical and environmental applications

Recent Development and Prospect of Multi-Degree-of-freedom Ultrasonic Motors

Synthesis of a micro motor actuated by remote resonant magnetic fields

Micro Electromagnetic Actuator For Micropump

The Study of an Electromagnetic Levitating Micromotor for Application in a Rotating Gyroscope

Novel Microstepping Control Methods for Electromagnetic Micromotors with Star-Connected Winding

Research on Micromachining Process of Micromachined Gyroscope with Electromagnetically Levitated Rotor

Geometry Design, Principles and Assembly of Micromotors

Optimization of /spl Phi/1 Mm Permanent Magnet Axial-Field Micromotor