Abstract:Compared with traditional electromagnetic motors, ultrasonic motors have many advantages, such as simple structures, quick response, no electromagnetic interference and so on. Tube-type ultrasonic micro-motors can operate in very small spaces, such as medical catheters, micro-robot and micro-craft drivers in the future because of their thin structures. Several tube-type ultrasonic micro-motors have been reported during the past decades. However, there are still some problems to solved, such as simplifying the structures and fixing the ceramic tube stators. Especially, little research has been done about the influence of pre-stress on the ultrasonic motors. In this paper, tube-type cantilevered ultrasonic micro-motors are presented. One end of the ceramic tube stator of the motor is fixed on a circuit board directly where no down-leads are used, and the other end is covered by a metal-cap, which is used to imprave the friction between the stator and rotor and enhance the rotation speed and output torque of the motor. The external wall of the ceramic tube is divided into four electrodes for the input voltage signals to generate two vertical bending vibrations, and the internal wall of the ceramic tube is grounded. Then the driving mechanism of this kind of motors is also analyzed.The resonance frequency and effective electro-mechanical coupling factor of the composite stators are analyzed by a FEM method, in which the stator is composed of a ceramic tube and a metal-cap. The results show that the resonance frequency and effective electro-mechanical coupling factor decrease with the in crease of the tube length and the mass of the metal cap, and a moderate tube length and small metal-cap are very suitable. Three motors using PZT piezoelectric ceramic tube with the diameter of 1mm and different lengths of 3.0 mm, 4.0 mm and 4.8 mm are manufactured. The resonance frequencies of these motors are measured by an impedance analyzer, which are in good agreement with the results of the FEM simulation. The rotation speeds of the micro-motors under different conditions are also measured by a laser vibrometer, which shows that rotation speeds of the motors increase with the applied voltage almost linearly, but decrease with the pre-stress increase. The motors have the maximum rotation speeds more than 60 r/s at their resonance frequencies as the pre-stress is suitable. Meanwhile, the pre-stress has little influence on the relations between the rotation speeds and the voltage variations. The average starting torques of the motors under different pre-stresses are also estimated by an "angular acceleration" method, which shows that the motors have large and stable output torques more than 3 ～ 4 μNm under a suitable pre-stress. At last, a possible explanation for the variation of the average starting torques of different motors with the pre-stresses is presented.

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