Development of Miniaturized Piezoelectric Ultrasonic Motor

褚祥诚,李龙土

DOI: https://doi.org/10.3969/j.issn.1004-2474.2001.04.010

2001-01-01

Abstract:This paper summarizes main research achievements on micro piezoelectric ultrasonic motors in China and abroad,and compares advantage and disadvantage among themThe author presents several suggestions on the development of micro piezoelectric ultrasonic motors

What problem does this paper attempt to address?

Development and Application of Millimeter Piezoelectric Micro Motor

ZHOU Tie-ying,LU Cun-yue,CHEN Yu

DOI: https://doi.org/10.3969/j.issn.1004-7018.2005.12.014

2005-01-01

Abstract:There is a increasing interest on millimeter piezoelectric micro-motors.However,its application is limited due to the complex construct of electromagnetic motors and a little output power of electrostatic motors.Piezoelectric motors are promising because of the unique advantages on simple construction and high power density.The development state,key technology,application fields and future of micro motor for diameter less than 10 millimeter are introduced in this paper.
Development of ultrasonic motor in USA

Xiangcheng Chu,Weishan Chen,Zaili Chen

1999-01-01

Abstract:Based on references and Internet network, the recent research and main trend of ultrasonic motors in USA were introduced. The research includes micro ultrasonic motors, piezo actuators with novel construction, durability of ultrasonic motor, the application of ultrasonic motor in the firmament.
Research and application on piezoelectric ceramic component with shear modes for micro-ultrasonic motor

Cun-Yue LU,Ji-Feng GUO,Tie-Ying ZHOU

DOI: https://doi.org/10.1142/9789812770165_0019

2007-01-01

Abstract:Commonly, the shear piezoelectric constant value for d15 is almost two times higher than those for d33 and d31. Also the value of share electro-mechanical coupling coefficient k15 is higher than those of k31 and k33. Sometimes a design for ultrasonic motor based on share coefficients d15 has the potential for superior performance. In the paper, we propose a new mechanism for exciting shear-bending vibration in piezoelectric ceramic rod. A solid piezoelectric ceramic rod is polarized along its axial direction. The surface of the cylindrical rod used as an electrode is plated with nickel. The cylindrical electrode was divided into four pairs and each pair has two parts symmetrically along the axes. If opposite voltage signals are applied to the electrode parts which are opposite on circumferential direction or along the axial direction, a shearing strain should be induced on the piezoelectric ceramic. Using a pair of alternating voltage signals (sine and cosine) on four pairs of electrodes, a shaking head vibration (wobbling motion) was generated circumferentially. A mini-ultrasonic motor prototype with this concept and a diameter of 6mm was designed. And its characteristics were determined experimentally. The design concept presented in this paper is much promising for applications in small motors, especially in those with piezoelectric ceramic rod stators with a large diameter-length ratio.
Technical Innovation's Setting about Ultrasonic Motor

LI Bao-ku,GUO Ji-feng,HU Min-qing,XU Jin-liang

DOI: https://doi.org/10.3969/j.issn.1004-7018.2005.02.012

2005-01-01

Abstract:This paper briefly expounds how to set and choose the technical innovation points about ultrasonic motor research in theory study,design process,material study,experimental test and industrialized exploitation.
Development and Application of Ultrasonic Motors Technologies

赵淳生,朱华

DOI: https://doi.org/10.3969/j.issn.1671-5276.2008.03.001

2008-01-01

Abstract:The development history and the application of the ultrasonic motor are reviewed,and its characteristics are also summarized.A method for classifying the ultrasonic motor is proposed.The development trends of the motor is pointed out.Some key technical problems,which have to be solved in the industrilization progress of the motor,are present according to the research actuality in our courtry.
Research on ￠1.8 mm Rod-type Micro Piezoelectric Ultrasonic Motor

Xiang-cheng CHU,Li YAN,Shu-xiang DONG,Long-tu LI

DOI: https://doi.org/10.3969/j.issn.1004-2474.2001.02.006

2001-01-01

Abstract:This paper presents a low-cost and simple-construction rod-type micro piezoelectric motor with ￠1.8 mm in diameter and bending vibration modes.The working mechanism,preparation processure and characteristics are investigated.The outline of piezoelectric transducer is rod with ￠1.8 mm×8 mm,while that of whole micro ultrasonic motor ￠1.8 mm×12 mm and its weight less 0.25 g.It has the features such as wide stable frequency range 3 kHz and maximum speed over 500 r/min without load.
Some Proposals for Development of Ultrasonic Motor Techniques in China

ZHAO Chun-sheng

2006-01-01

Abstract:The development of ultrasonic motor techniques at home and abroad is simply presented.The characteristics of developing ultrasonic motor techniques at abroad is mainly introduced.According to the state of art on the motors at home and abroad,some proposals is put forward for development of ultrasonic motor techniques in China.
Review on Development of Micromotor

李翠萍,柴凤,宫海龙,程树康

DOI: https://doi.org/10.3969/j.issn.1004-7018.2009.04.019

2009-01-01

Abstract:Micromotor has become a hot topic which more and more scholars study on due to the demands of motor miniaturization,low speed and high precision etc.The principle,development status and application of various micromotors were summanized,and the advantages and disadvantages of different micromotors were analyzed in detail and compared.The research and optimization of micromotor is of great importance for medicine,aerospace,robot fields.
Study on piezoelectric cylinder micro ultrasonic motor with 1 mm diameter

张凯,周铁英,王欢,袁世明,郭钊,姜开利,白桂珍

DOI: https://doi.org/10.3321/j.issn:0371-0025.2004.03.012

2004-01-01

Abstract:A tiny ultrasonic motor was constructed by using a cylindrical piezoelectric ceramic as stator. The fabricated tiny motor has a diameter of 1 mm, a length of 5 mm and a weight of 36 mg. Four electrodes were deposited on the stator's surface and evenly distributed along the circumferential direction. A polarization method was developed for the stator and the space between two adjacent electrodes was carefully designed. By using the bending mode vibration of the stator, the tiny motor shows a performance with 1800 rpm speed and 4 μNm stalled torque and can be bear higher drive voltage until 350 Vpp. With the same technique, fabrication of even smaller motor can be envisioned.
Research of Ultrasonic Motor in SCI-E Electron Database

ZHAO Ya-jie,YANG Ming

DOI: https://doi.org/10.3969/j.issn.1001-6848.2008.02.018

2008-01-01

Abstract:Based on the SCI-E electron database,this paper analyzes the development of ultrasonic motors both internationally and domestically.Through the search under the conditions of the author,Country/territory,institution name,publication year,source title,subject category the development and trend of ultrasonic motors are presented objectively and comprehensively.These concrete numerals provide the reference and the help for the research on ultrasonic motors in China.
A Survey and Current Research of Ultrasonic Motor

Minghui Hao

2006-01-01

Abstract:It indicates the advantages of ultrasonic motor compared with the existing electromagnetic motor.Development,production and application of ultrasonic motor are introduced and analyzed,which shows that ultrasonic motors are used in the area of domestic production in Japan,European countries focus development on high precision actuators and American research is aiming at spaceflight and military application.The working principles,features and performance of the typical traveling wave motor,standing wave motor,large torque motor,multi-freedom motor,micro motor and non-contact motor are introduced.It is shown that the present research of ultrasonic motor is focused on the accurate mathematic model,novel structure,the capability of piezoelectric ceramics and frictional material and the improvement of control method to extend the service longevity and improve the performance of ultrasonic motor.
Recent Development and Prospect of Multi-Degree-of-freedom Ultrasonic Motors

GUO Ji-feng,BAI Yang,WANG Jian

DOI: https://doi.org/10.3969/j.issn.1000-3835.2013.15.001

2013-01-01

Abstract:Ultrasonic motors(USM) have the advantages of low speed,high torque,quick response,high resolution and anti-electromagnetic interference capability,which bring them broad application prospect in fields of robots,industrial instruments and security technologies.Multi-degree-of-freedom(MDOF) motor is one of the most cutting-edge aspects in the ultrasonic motor researches.Several typical MDOF ultrasonic motors of different types were introduced.The structure,working principle and characteristics were mainly discussed.Some typical examples were given and the key achievements were summarized,as well as their applications.The research and development trends were proposed.
Ultrasonic micro-motor using miniature piezoelectric tube with diameter of 1.0 mm

Hui Zhang,Shu-xiang Dong,Shu-yi Zhang,Tian-hua Wang,Zhong-ning Zhang,Li Fan

DOI: https://doi.org/10.1016/j.ultras.2006.05.064

IF: 4.2

2006-01-01

Ultrasonics

Abstract:At the present moment, the smallest piezoelectric ultrasonic micro-motors utilizing miniature PZT piezoelectric ceramic tubes were developed. The motor consists of a PZT-metal composite tube stator, two steel rotors and a thin shaft that keeps the two rotors pressing on both ends of the stator elastically. The dimensions of the PZT tube are 1.0mm in outer diameter, 0.6mm in inner diameter and 5.0mm in length. The diameter and total length of the assembled micro-motor is 1.0mm and 8mm (including an adjusting spring), respectively. The tube-type micro-motor is driven by two pairs of alternative voltages with phase shift 90° between the adjacent electrodes and operated in the first circular-bending vibration mode of the stator with the resonance frequency about 58kHz. The experimental results show that the tube-type micro-motors have perfect performances: (i) high rotation frequency over 3000rpm and (ii) large starting torque over 7.8μNm under the conditions of the input voltage of 110Vp–p and the resonance frequency. The micro-motor is well suitable for operating in micro-spaces, such as in intravascular, micro-robots and micro-craft applications.
Modeling and Preliminary Analysis of a Miniaturized Rotary Motor Driven by Single Piezoelectric Stack Actuator

Weiting Liu,Maoying Zhou,Cesare Stefanini,Xin Fu

DOI: https://doi.org/10.1177/1045389x15595293

IF: 2.7

2015-01-01

Journal of Intelligent Material Systems and Structures

Abstract:This paper presents a compact motor (6 mm in diameter) with a single piezoelectric stack actuator and a frame structured stator, which works under the principle of natural inchworms. Preliminary motion analysis and dynamic modeling are conducted based on the assumption of structural rigidity. The prototype can generate output torque of about 279 nNm and speed up to 200 rpm with a power input of 60 Vpp at the frequency of 12.7 kHz. In addition, rotational concentricity of the motor is discussed via analyzing captured video of the operating motor. Compared with the previous prototype that is 17 mm in diameter, the simplicity of the motor structure provides an effective miniaturization solution, which is important to many applications such as medical instruments and consumer electronics.
Experimental Investigation on Friction Characteristics of Ultrasonic Motor

王文浩,郭吉丰,金龙,曲建俊,王光庆

DOI: https://doi.org/10.16078/j.tribology.2010.02.019

2010-01-01

Tribology

Abstract:Ultrasonic motor is an unconventional motor driven by (notional force and high frequency vibration based on the principle of inverse piezoelectric effect. The high frequency vibration and minor amplitude between the stator and rotor have its own characteristics at friction interface, which is different from the traditional interface. The characteristics have significant effect on conversion efficiency, motor's lifetime and the choice of frictional material. This paper presented the dynamic friction coefficient in normal, standing wave and the traveling wave measured by self-manufactured experiment structure. The influences of the relative speed, preload and temperature's impact on friction coefficient between the stator and rotor were analyzed. The relationship between friction coefficient and preload was explained from friction binomial and elastoplasticity contact state of the interface. The paper also explained the effect of friction reduction in the presence of ultrasonic vibrations both from standing wave and traveling wave. The impact of temperature on friction coefficient was also tested. Finally, this paper revealed a friction model for ultrasonic motor. The friction reduction for ultrasonic motor was a foundmental work, which was useful for design, modeling and controlling of ultrasonic motor.
Ultrasonic Micro-Motor with Multilayer Piezoelectric Ceramic and Chamfered Driving Tips

Yanqiang Zhao,Songmei Yuan,Xiangcheng Chu,Shuning Gao,Zuojin Zhong,Cong Zhu

DOI: https://doi.org/10.1063/1.4963662

IF: 1.6

2016-01-01

Review of Scientific Instruments

Abstract:In this study, an oblate-type ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips was proposed and experimentally researched. The micro-motor works based on the standing-wave principle and has a higher rotary speed than the traditional standing-wave one in principle, reaching a rotary speed of 2100 r/min in this study at the voltage of 20 Vp−p. When the micro-motor rotates, single phase alternating current is required, namely, V=Asinωt, and exchanging the signal wire and ground wire will not change the rotary direction of the motor, which reinforces the safety and the compaction of this motor. The ratio of the maximum displacement value of the speed feeding direction and the preload direction is approximately 4, showing a characteristic of high speed and low ability to load.
Survey on MEMS Micromotor

戴福彦,张卫平,陈文元,刘凯,马高印,肖奇军,张忠榕

DOI: https://doi.org/10.3969/j.issn.1001-6848.2009.08.018

2009-01-01

Abstract:Introduced the essential principle,construction,parameter of electrets micromotor,corona micromotor,reluctance micromotor,permanent magnetic micromotor,piezoelectric ultrasonic micromotor,molecular micromotor and nanomotor.Described research situation,development prospect and the application at home and abroad in this paper.
Optimization and Analysis of a U-Shaped Linear Piezoelectric Ultrasonic Motor Using Longitudinal Transducers

Hongpeng Yu,Qiquan Quan,Xinqi Tian,He Li

DOI: https://doi.org/10.3390/s18030809

2018-01-01

Abstract:A novel U-shaped piezoelectric ultrasonic motor that mainly focused on miniaturization and high power density was proposed, fabricated, and tested in this work. The longitudinal vibrations of the transducers were excited to form the elliptical movements on the driving feet. Finite element method (FEM) was used for design and analysis. The resonance frequencies of the selected vibration modes were tuned to be very close to each other with modal analysis and the movement trajectories of the driving feet were gained with transient simulation. The vibration modes and the mechanical output abilities were tested to evaluate the proposed motor further by a prototype. The maximum output speed was tested to be 416 mm/s, the maximum thrust force was 21 N, and the maximum output power was 5.453 W under frequency of 29.52 kHz and voltage of 100 V-rms. The maximum output power density of the prototype reached 7.59 W/kg, which was even greater than a previous similar motor under the exciting voltage of 200 V-rms. The proposed motor showed great potential for linear driving of large thrust force and high power density.
A Miniature Piezoelectric Ultrasonic Motor Based on Circular Bending Vibration Mode

SX Dong,SX Wang,WJ Shen,LT Li

DOI: https://doi.org/10.1109/3516.891043

2000-01-01

IEEE/ASME Transactions on Mechatronics

Abstract:A rod-type miniature piezoelectric ultrasonic motor based on free-free bending vibration mode with improved construction was developed for application of precise positioner,The design methodology, construction, and operation principle of the motor are presented. By using the finite-element method, the motor's vibration modes and driving mechanism were modeled. The characteristics of the prototype were investigated experimentally. The experimental results first reveal that both a corrugated tube type of horn and "soft-type" piezoelectric ceramic in the piezoelectric transducer (stator) can widen the band of operational frequency of the motors notably The developed prototypes, 15 mm in diameter and 25 mm in length, have shown some advantages such as low speed (70 r/min) with large torque (0.855 (NM)-M-.), very high resolution (0.01 degrees), and good speed stability of over 10 h, etc. The miniature motor has been successfully applied to laser resonant cavity as a precise driving element.
Design and Performance Evaluation of a Miniature I-shaped Linear Ultrasonic Motor with Two Vibrators

Zhen Liu,Qianwei Fu,Peng Yang,Zhiyan Dong,Lihua Zhang,Zhiyuan Yao

DOI: https://doi.org/10.1016/j.ultras.2023.106965

IF: 4.2

2023-01-01

Ultrasonics

Abstract:In this study, a novel miniature I-shaped linear ultrasonic motor is proposed. The motor is constructed by two rectangular piezoelectric vibrators which are mounted in parallel with the slider to make the structure look like the letter "I". The symmetric and antisymmetric modes of the motor based on the first-order flexural vibrations of the two vibrators are chosen as the working modes. The finite element method is adopted to optimize the structure and study the vibration behavior of the motor. A prototype of the proposed linear ultrasonic motor is fabricated and its mechanical characteristics are tested. The dimension of the stator is 39.8 x 17.6 x 6 mm3 and the weight of the prototype is only 18.2 g. The typical outputs of the prototype are maximum speed of 364 mm/s, maximum thrust of 500 g and thrust-weight ratio of 24.47. The experimental results confirm that the developed linear ultrasonic motor has the advantages of structural design and miniaturization.

Development of Miniaturized Piezoelectric Ultrasonic Motor

Development and Application of Millimeter Piezoelectric Micro Motor

Development of ultrasonic motor in USA

Research and application on piezoelectric ceramic component with shear modes for micro-ultrasonic motor

Technical Innovation's Setting about Ultrasonic Motor

Development and Application of Ultrasonic Motors Technologies

Research on ￠1.8 mm Rod-type Micro Piezoelectric Ultrasonic Motor

Some Proposals for Development of Ultrasonic Motor Techniques in China

Review on Development of Micromotor

Study on piezoelectric cylinder micro ultrasonic motor with 1 mm diameter

Research of Ultrasonic Motor in SCI-E Electron Database

A Survey and Current Research of Ultrasonic Motor

Recent Development and Prospect of Multi-Degree-of-freedom Ultrasonic Motors

Ultrasonic micro-motor using miniature piezoelectric tube with diameter of 1.0 mm

Modeling and Preliminary Analysis of a Miniaturized Rotary Motor Driven by Single Piezoelectric Stack Actuator

Experimental Investigation on Friction Characteristics of Ultrasonic Motor

Ultrasonic Micro-Motor with Multilayer Piezoelectric Ceramic and Chamfered Driving Tips

Survey on MEMS Micromotor

Optimization and Analysis of a U-Shaped Linear Piezoelectric Ultrasonic Motor Using Longitudinal Transducers

A Miniature Piezoelectric Ultrasonic Motor Based on Circular Bending Vibration Mode

Design and Performance Evaluation of a Miniature I-shaped Linear Ultrasonic Motor with Two Vibrators