An Axial Flux Electromagnetic Micromotor

CS Yang,XL Zhao,GF Ding,C Zhang,BC Cai
DOI: https://doi.org/10.1088/0960-1317/11/2/305
2001-01-01
Journal of Micromechanics and Microengineering
Abstract:In this paper, the principle, design, fabrication and performance of an axial flux electromagnetic micromotor are described. The stator of the micromotors consists of six levels of copper windings and an alumina filling using a modified LIGA (Lithographic Galvanoforming Abforming)-like technology. The rotor is a disc made of SmCo permanent magnetic alloy using the electro discharge machining (EDM) technique and it is magnetized with pairs of magnetic poles using a specially designed apparatus. The rotor and the stator are assembled together to form the micromotor. The dimensions of the assembled motors are 1 mm and 2 mm in diameter and about 1.5 mm thick. The rotation speed of the micromotors can be adjusted from several hundreds to over ten thousand rpm and the rotation is reversible. The output torques of the micromotor are measured to be 1.5 µN m and 2.8 µN m for motors with diameters of 1 mm and 2 mm, respectively.
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