Application of AZ4903 to the Production of Micromotor's Stator Windings

GUO Zhanshe,Wu Yihui,MENG Yonggang
DOI: https://doi.org/10.3321/j.issn:1000-0054.2005.08.015
2005-01-01
Abstract:Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotor's stator windings. The production method can optimize the coating thickness as a function of the relational speed and the prebaking time as a function of the operating temperature. The optimal lithography and developing times are also given. A winding thickness of 40 μm gives the ideal perpendicularity. Tests of the rotational speeds and pull-out torque of the micromotors show that the micromotor works at steady speeds with little ripple of the pull-out torque.
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