Design of Ironless Planar Motor for Long-stroke Motion and Full Rotation

Yaying CHEN,Jie ZHANG,Ming ZHANG

DOI: https://doi.org/10.3969/j.issn.1001-6848.2017.06.001

2017-01-01

Abstract:Besides long-stroke movements along different axes,full rotation around the z-axis is also needed in many applications,especially in semiconductor device fabrication.This paper focused on the design of the planar motor with circular coils for such motion requirement.A real-time model was proposed to predict the force and torque exerted on the magnet array according to the rotation invariance of the circular coil firstly.Then the main dimensions of the planar motor were optimized for minimizing the ohmic loss with the decoupling strategy based on the Moore-Penrose inverse.According to the optimization result,a prototype stage was manufactured,and several relational experiments were also achieved.The measurement data of the force and the torque was agreed with the proposed model.The error of the decoupling strategy of the force and torque is less than 6％.Finally,a planar motion about 100 mm × 100 mm and 360° rotation around the zaxis was archived.