Abstract:Light-driven micro/nanorobots (LMNRs) are tiny, untethered machines with great potential in fields like precision medicine, nano manufacturing, and various other domains. However, their practicality hinges on developing light-manipulation strategies that combine versatile functionalities, flexible design options, and precise controllability. Our study introduces an innovative approach to construct micro/nanorobots (MNRs) by utilizing micro/nanomotors as fundamental building blocks. Inspired by silicon Metal-Insulator-Semiconductor solar cell principles, we design a new type of optomagnetic hybrid micromotors (OHMs). These OHMs have been skillfully optimized with integrated magnetic constituent, resulting in efficient light propulsion, precise magnetic navigation, and the potential for controlled assembly. One of the key features of the OHMs is their ability to exhibit diverse motion modes influenced by fracture surfaces and interactions with the environment, streamlining cargo conveyance along "micro expressway" - the predesigned microchannels. Further enhancing their versatility, a template-guided assembly strategy facilitates the assembly of these micromotors into functional microrobots, encompassing various configurations such as "V-shaped", "N-shaped", and 3D structured microrobots. The heightened capabilities of these microrobots, underscore the innovative potential inherent in hybrid micromotor design and assembly, which provides a foundational platform for the realization of multi-component microrobots. Our work moves a step toward forthcoming microrobotic entities boasting advanced functionalities.

Silicon-based micro electrostatic motors

Research on Permanent Magnet linear Synchronous Motors Driver for Micro-fabrication

Macro modeling method for electrostatic-drive silicon diaphragm

Rotation Control and Characterization of High-Speed Variable-Capacitance Micromotor Supported on Electrostatic Bearing.

Design and Simulation of an Active Electrostatic Bearing for MEMS Micromotors

The On-Chip Detection of Micromotor Rotational Speed

Modeling and Preliminary Analysis of a Miniaturized Rotary Motor Driven by Single Piezoelectric Stack Actuator

Modeling of an electrostatic micromotor based on a levitated rotor

Modeling and Analysis of A Micromotor with an Electrostatically Levitated Rotor

Design of mesa structure wobble micromotor with optical-electronic IC

Experimental study of a variable-capacitance micromotor with electrostatic suspension

CMOS-MEMS electrostatic micromotor based on FGMOS transduction by electromechanical modification of its coupling coefficient and low operating voltage

A bio-inspired piezoelectric motor with simple structured asymmetric stator

A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology

Design and Experimental Validation of a Linear Piezoelectric Micromotor for Dual-Slider Positioning

Numerical and experimental investigations on the influence factors of diamagnetic levitated electrostatic motor

Micro-DC rotary-motor working smoothly with neither contact brush nor fixed-axis

Portable Electrochemical Sensor for Micromotor Speed Monitoring

Research on the Optimization Method of Top-Drive Variable-Capacitance Micromotors

Modular Micromotor Fabrication with Self‐Focusing Lithography

Template‐guided Silicon Micromotor Assembly for Enhanced Cell Manipulation