Development of Textured ZnO∶Al Transparent Conductive Oxide Thin Films

He Jingjing,Wu Xuemei,Zhuge Lanjian,Ge Shuibing
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.05.006
2010-01-01
Abstract:Textured aluminum doped ZnO(AZO)transparent conductive films are widely used as front contacts in solar cells due to the low resistivity,high transmittance in the visible region,incident light scattering effectively for the textured structure and improving the photoelectric conversion efficiency.The preparation methods of the textured AZO are summarized.It is introduced in detail that the texture surface is made by the wet etching after AZO films are deposited by magnetron sputtering technology.The samples show the "crater" or "lunar landscape-like" appearance.The effects of the process on film structures,photoelectric properties and etching behaviors are discussed.Finally,the applications of textured AZO in silicon thin film solar cells are introduced,the development trends of textured AZO thin films are further reducing production costs and achieving large-scale industrial production.
What problem does this paper attempt to address?