Development of Microstructure In/Pd-doped SnO2 Sensor for Low-Level CO Detection

Tong Zhang,Li Liu,Qi,Shouchun Li,Geyu Lu
DOI: https://doi.org/10.1016/j.snb.2009.03.036
2009-01-01
Abstract:In/Pd-doped SnO2 is synthesized via a sol–gel method and coated on a silicon substrate with Pt electrodes to fabricate a microstructure sensor. The sensor shows high response to CO with very low cross response to common interference gases at an operating temperature of 140°C. Especially, the sensor can detect CO down to 1ppm (the response value is about 3), and the response time and recovery time are about 15 and 20s, respectively. These results make our sensor a good candidate in practical CO sensors.
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