Abstract:This paper reports a facile method for creating a nanostructured metal oxide film on a low power microheater sensor platform and the direct realization of this structure as a gas sensor. By fast annealing the deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in situ and locally on the sensor platform. With only minimal processing, a high performance, miniaturized gas sensor is ready for use. A carbon monoxide sensor using the in situ synthesized porous tin oxide (SnO2) sensing film is made as a demonstration of this technique. The sensor exhibits a low detection limit and fast response and recovery time at a low operating temperature. This facile fabrication method is highly flexible and has great potential for large-scale gas sensor fabrication.

In Situ Localized Growth of Porous Tin Oxide Films on Low Power Microheater Platform for Low Temperature CO Detection