In/Pd-Doped SnO 2 -Based CO Micro-Structure Sensor with High Sensitivity and Quick Response

Liu Li,Zhang Tong,Li Shou-Chun,Wang Lian-Yuan,Fan Hui-Tao,Li Wei
DOI: https://doi.org/10.1088/0256-307x/26/10/100702
2009-01-01
Abstract:In/Pd-doped SnO2 is synthesized via a sol-gel method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensor can be used to detect CO down to 1 ppm (the sensitivity is about 3), and the response time and recovery time are about 5 and 15s, respectively. Excellent selectivity is also found based on our sensor. These results demonstrate a promising approach to fabricate high-performance CO sensors with high sensitivity and quick response.
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