Reseach on SAW CO Gas Sensor Based on PAN/In2O3 Selective Layer

Peng ZHANG,Ming CHEN,Peng-ju HE
DOI: https://doi.org/10.3969/j.issn.1004-2474.2009.03.002
2009-01-01
Abstract:To overcome the low sensitivity,high working temperature and high cost of the traditional CO gas sensors,a room temperature SAW(Surface Acoustic Wave) CO gas sensor has been fabricated on ST SiO2 with a 1.2 μm ZnO protective layer for the SAW IDT(Inter-digital Transducers).The dual-path architecture,one for sensing and one for reference was used to compensate for the disturbance of temperature.To increase selectivity and sensitivity,the In2O3-doping-polyaniline layers of thickness 0.5 μm and 1.2 μm were employed.The novel sensor was exposed to CO gases.The sensor's performance was analyzed in terms of frequency shift as a function of different gas concentrations.The sensors were tested over a range of operating temperatures between-40 ℃ and 85 ℃.Fast response and recovery times with good repeatability were observed at room temperature;demonstrating high sensitivity of the SAW structure with the In2O3-doping-polyaniline thin film.
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