Large-scale Molecular Dynamics Simulation for Two Ar Clusters Impact on 4H–sic

S. Satake,N. Inoue,T. Kunugi,M. Shibahara,H. Kasahara
DOI: https://doi.org/10.1016/j.nimb.2007.01.055
IF: 1.279
2007-01-01
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Abstract:Large-scale molecular dynamics simulations with two Ar688 cluster impacts on a 4H–SiC surface are performed to investigate two clusters collisions for lateral sputtering mechanism. The target atoms are described by Tersoff potential with some modifications for 4H–SiC. Two Ar clusters are assumed by Ar688, which are described by simple Lennard-Jones potential. The initial velocity of both clusters is 2.55×104m/s when the acceleration voltage is 100keV. The computational volume is 30nm×30nm×16nm, which is constructed by 1444608 4H–SiC atoms. After 0.8ps of the impact on the 4H–SiC surface from a first Ar cluster, a second argon cluster collides at a position that is one “diameter” away from the center of the first impact and where term the “diameter” refers to the diameter of the footprint of the first impact on 4H–SiC. Consequently, the crater formed by the first cluster is smeared out by the lateral sputtering effect of the second cluster.
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