Abstract:The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.

Status and Progress of MEMS Variable Capacitors

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Linear stiffness tuning of MEMS triangular capacitors

Symmetric Toggle Structured Mems Linear Variable Capacitor with Large Tunning Ratio

Optimization of a MEMS Variable Capacitor with High Linearity and Large Tuning Ratio

Simulation Design of a High Q Tunable Capacitor with Comb Structure

Micro-Machined Variable RF Capacitor Based on Glass Substrate

MEMS based digital variable capacitors with a high-k dielectric insulator

RF MEMS Component for Tunable BAN Front-End

Carbon Microelectromechanical Systems (C-Mems) Based Microsupercapacitors

Design and Simulation of a High-Tuning-Range RF MEMS Voltage-Controlled Capacitor

Effect of Etch Holes on the Capacitance and Pull-In Voltage in Mems Tunable Capacitors

3D HfO<sub>2</sub> Thin Film MEMS Capacitor with Superior Energy Storage Properties

Investigation of microvalve based on microelectromechanical systems

Design and Fabrication of a Micro-Capacitor for Nano Probing System

Concepts and Key Technologies of Microelectromechanical Systems Resonators

MEMS Technology Status and Development Prospects

High Power-Efficiency Readout Circuit for MEMS Capacitive Accelerometer

Tunable RF MEMS capacitor for wireless communication

The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology