Abstract:Superconductor digital electronics using Josephson junctions as ultrafast switches and magnetic-flux encoding of information was proposed over 30 years ago as a sub-terahertz clock frequency alternative to semiconductor electronics based on complementary metal-oxide-semiconductor (CMOS) transistors. Recently, interest in developing superconductor electronics has been renewed due to a search for energy saving solutions in applications related to high-performance computing. The current state of superconductor electronics and fabrication processes are reviewed in order to evaluate whether this electronics is scalable to a very large scale integration (VLSI) required to achieve computation complexities comparable to CMOS processors. A fully planarized process at MIT Lincoln Laboratory, perhaps the most advanced process developed so far for superconductor electronics, is used as an example. The process has nine superconducting layers: eight Nb wiring layers with the minimum feature size of 350 nm, and a thin superconducting layer for making compact high-kinetic-inductance bias inductors. All circuit layers are fully planarized using chemical mechanical planarization (CMP) of SiO2 interlayer dielectric. The physical limitations imposed on the circuit density by Josephson junctions, circuit inductors, shunt and bias resistors, etc., are discussed. Energy dissipation in superconducting circuits is also reviewed in order to estimate whether this technology, which requires cryogenic refrigeration, can be energy efficient. Fabrication process development required for increasing the density of superconductor digital circuits by a factor of ten and achieving densities above 10^7 Josephson junctions per cm^2 is described.

Hybrid Josephson-CMOS memory: a solution for the Josephson memory problem

Josephson-CMOS Hybrid Memory with Ultra-High-speed Interface Circuit

Implementation and low speed test of ultra-fast interface circuits for Josephson-CMOS hybrid memories

Demonstration Of Fully Functional 64-Kb Josephson/Cmos Hybrid Memory

Hybrid superconducting-magnetic memory device using competing order parameters

Josephson vortex-based memory

Very Large Scale Integration of Josephson-Junction-Based Superconductor Random Access Memories

Mesoscopic superconducting memory based on bistable magnetic textures

Nonvolatile Memory Cell Using a Superconducting-Ferromagnetic Π Josephson Junction

Solitonic Josephson-based meminductive systems

Electrically-controlled hybrid superconductor-ferromagnet cell for high density cryogenic memory

Preliminary demonstration of a persistent Josephson phase-slip memory cell with topological protection

Superconductor bistable vortex memory for data storage and in-memory computing

Demonstration of a Josephson vortex-based memory cell with microwave energy-efficient readout

Superconducting Pulse Conserving Logic and Josephson-SRAM

A Compact Superconducting Nanowire Memory Element Operated by Nanowire Cryotrons

Superconductor Digital Electronics: Scalability and Energy Efficiency Issues

Hybridized Solid-State Qubit in the Charge-Flux Regime

Quantum Computer Control using Novel, Hybrid Semiconductor-Superconductor Electronics

Shunt-free cryogenic memory using ferromagnetic insulator-based Josephson junctions

Ferromagnetic Josephson switching device with high characteristic voltage