Abstract:Superconductor digital electronics using Josephson junctions as ultrafast switches and magnetic-flux encoding of information was proposed over 30 years ago as a sub-terahertz clock frequency alternative to semiconductor electronics based on complementary metal-oxide-semiconductor (CMOS) transistors. Recently, interest in developing superconductor electronics has been renewed due to a search for energy saving solutions in applications related to high-performance computing. The current state of superconductor electronics and fabrication processes are reviewed in order to evaluate whether this electronics is scalable to a very large scale integration (VLSI) required to achieve computation complexities comparable to CMOS processors. A fully planarized process at MIT Lincoln Laboratory, perhaps the most advanced process developed so far for superconductor electronics, is used as an example. The process has nine superconducting layers: eight Nb wiring layers with the minimum feature size of 350 nm, and a thin superconducting layer for making compact high-kinetic-inductance bias inductors. All circuit layers are fully planarized using chemical mechanical planarization (CMP) of SiO2 interlayer dielectric. The physical limitations imposed on the circuit density by Josephson junctions, circuit inductors, shunt and bias resistors, etc., are discussed. Energy dissipation in superconducting circuits is also reviewed in order to estimate whether this technology, which requires cryogenic refrigeration, can be energy efficient. Fabrication process development required for increasing the density of superconductor digital circuits by a factor of ten and achieving densities above 10^7 Josephson junctions per cm^2 is described.

Superconducting Pulse Conserving Logic and Josephson-SRAM

High-Density Superconductive Logic Circuits Utilizing 0 and $π$ Josephson Junctions

Low Power Computing Using STT-MRAM

Low-power Rapid Planar Superconducting Logic Devices

Josephson-CMOS Hybrid Memory with Ultra-High-speed Interface Circuit

STT-MRAM Based Low Power Synchronous Non-Volatile Logic with Timing Demultiplexing

Charge-based superconducting digital logic family using quantum phase-slip junctions

Attojoule superconducting thermal logic and memories

Scalable 2T2R Logic Computation Structure: Design from Digital Logic Circuits to 3-D Stacked Memory Arrays

Hybrid Josephson-CMOS memory: a solution for the Josephson memory problem

CP-SRAM

High Speed, Low Resource and Non-volatile MTJ-CMOS Hybrid Logical Circuits

Very Large Scale Integration of Josephson-Junction-Based Superconductor Random Access Memories

High-Speed, Low-Power, and Error-Free Asynchronous Write Circuit for Stt-Mram and Logic

Superconductor Logic Implementation with All-JJ Inductor-Free Cell Library

CP-SRAM: charge-pulsation SRAM marco for ultra-high energy-efficiency computing-in-memory

Superconductor Digital Electronics: Scalability and Energy Efficiency Issues

Reproducible Operating Margins on a 72,800-Device Digital Superconducting Chip

In-Memory Direct Processing Based On Nanoscale Perpendicular Magnetic Tunnel Junctions

A High Throughput In-MRAM-Computing Scheme Using Hybrid P-Sot-mtj/gaa-cntfet

A 9T-SRAM Based Computing-in-memory with Redundant Unit and Digital Operation for Boolean Logic and MAC