Abstract:With the rapid development of 5G technology, acoustic wave filters with large bandwidths are urgently required to deal with the explosive increase in data traffic. Recently, there is extensive attention paid to shear-horizontal (SH) surface acoustic wave (SAW) resonators based on lithium niobate (LiNbO3) substrates, thanks to its large effective coupling coefficient (k(eff)(2)). However, because of the bulk acoustic wave (BAW) energy radiation into the LiNbO3 substrate, it is very challenging to obtain a high quality factor (Q) for SH-SAW resonators. In this study, a 30 degrees YX-LiNbO3/SiO2/Si SAW resonator with the SH mode is proposed to achieve a large coupling and a high Q simultaneously. By bonding a LiNbO3 thin film onto a thermally oxidized Si(100) substrate, the velocity mismatch between the piezoelectric layer and the SiO2/Si substrate could significantly reduce the BAW energy leakage. Finite element method simulation is employed to optimize the cut angle of the LiNbO3 film and the thickness of each layer. The fabricated SH-SAW resonators with a resonant frequency of 924 MHz yield a k(eff)(2) of 24.8% and a maximum of Bode-Q (Bode-Q(max)) of 1107. In comparison with the previously reported same-type SAW resonators, a higher Bode-Q(max) is demonstrated in this work when their k(eff)(2) is larger than 20%, providing a potential solution to enable wideband tunable filters in the 5G communication system. Published under an exclusive license by AIP Publishing.

Improvement of Shape Factor and Loss of Surface Acoustic Wave Resonator Filter Composed of SiO<sub>2</sub>/High-Density-Electrode/LiTaO<sub>3</sub>

Analysis of SAW Resonator on SiO 2 / Al / LiNbO 3 Structure by using FEM / SDA FEM / SDA SiO 2 / Al / LiNbO 3 SAW

A Low-Loss Wideband SAW Filter with Low Drift Using Multilayered Structure

High Frequency, Low Loss and Low TCF Acoustic Devices on LiTaO3-on-SiC Substrate

High-performance SH-SAW resonator using optimized 30 degrees YX-LiNbO3/SiO2/Si

Structure With Thin Siox/Sinx Bilayer And Al Electrodes For High-Frequency, Large-Coupling, And Low-Cost Surface Acoustic Wave Devices

Wideband and Low-Loss Surface Acoustic Wave Filter Based on 15° YX-LiNbO₃/SiO₂/Si Structure

High-Performance Acoustic Wave Devices on LiTaO$_{3}$/SiC Hetero-Substrates

Near 30% Fractional Bandwidth Surface Acoustic Wave Filters with Novel Electrode Configuration

Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO<inf>3</inf>/SiO<inf>2</inf>/Si Substrate

SAW Filters with Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers

Zero Temperature Coefficient of Frequency Surface Acoustic Wave Resonator for Narrow-Duplex-Gap Application on SiO2/Al/LiNbO3 Structure

Analysis of Rayleigh-Mode Spurious Response Using Finite Element Method/Spectrum Domain Analysis for Surface Acoustic Wave Resonator on Nonflat SiO<sub>2</sub>/Al/LiNbO<sub>3</sub> Structure

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate

High-performance SH-SAW resonator using optimized 30° YX-LiNbO 3 /SiO 2 /Si

A Composite Absorber of FSS and Area-coated Honeycomb Using High-loss Materials for Broadband Applications

Experimental Studies of Q Deterioration in SH-Type SAW Resonators Employing an Apodized Interdigital Transducer IDT SH SAW

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators

Flexible Design and Realization of Wideband Microwave Absorber with Double-Layered Resistor Loaded FSS

Analysis Of Rayleigh-Mode Spurious Response Using Finite Element Method/Spectrum Domain Analysis For Surface Acoustic Wave Resonator On Nonflat Sio2/Al/Linbo3 Structure