Analysis Of Rayleigh-Mode Spurious Response Using Finite Element Method/Spectrum Domain Analysis For Surface Acoustic Wave Resonator On Nonflat Sio2/Al/Linbo3 Structure

Hiroyuki Nakamura,Hidekazu Nakanishi,Rei Goto,Ken-Ya Hashimoto,Masatsune Yamaguchi

DOI: https://doi.org/10.1143/JJAP.49.07HD20

IF: 1.5

2010-01-01

Japanese Journal of Applied Physics

Abstract:Because of their low insertion loss, high out-of-band rejection, and high power durability, miniature surface acoustic wave (SAW) duplexers are widely used in mobile phones. Substrate materials substantially limit and determine the performance of SAW duplexers; for their applications to Band I and Band IV systems with large pass-band widths and wide frequency separations between the transmitting and receiving frequency bands, a larger coupling coefficient (K-2) is of primary importance. We have developed a shape-controlled SiO2 film/Al electrode/LiNbO3 substrate structure for their applications. It could lead to a large K-2 and suppression of Rayleigh-mode spurious response. In this paper, we report the analysis using finite element method/spectrum domain analysis (FEM/SDA) for the SAW resonator on a nonflat SiO2 film/Al electrode/LiNbO3 structure. It was clarified that the shape-controlled SiO2 was effective in terms of achieving a large K-2 for the SAW resonator with suppressed Rayleigh-mode spurious responses and bulk wave radiation. Furthermore, the experiment results showed a good agreement with the analysis results. (C) 2010 The Japan Society of Applied Physics