A Low-Loss Wideband SAW Filter with Low Drift Using Multilayered Structure

Junyao Shen,Sulei Fu,Rongxuan Su,Zengtian Lu,Huiping Xu,Peisen Liu,Rui Wang,Tongjin Chen,Xingshuai He,Fei Zeng,Cheng Song,Weibiao Wang,Feng Pan

DOI: https://doi.org/10.1109/led.2022.3185003

IF: 4.8157

2022-01-01

IEEE Electron Device Letters

Abstract:This research aims to overcome the tradeoff between bandwidth, temperature stability of frequency, and loss in surface acoustic wave filters. A novel multilayered structure, SiO2/Cu-grating/ $15^{\circ }~{Y}$ - ${X}$ LiNbO3/SiO2/sapphire, is proposed. Resonators based on the multilayered structure are studied theoretically and experimentally. The results show that the multilayered structure can sufficiently suppress leaky wave and spurious responses, which significantly degrade the performance of devices based on conventional SiO2/Cu-grating/ $15^{\circ }~{Y}$ - ${X}$ LiNbO3 structure. Fabricated resonators exhibit high performance including low frequency drift, large coupling, and large quality factor. A multilayered structure filter is designed, fabricated, and measured, resulting in a flat and clean passband with a small minimum insertion loss of only 1.01 dB. A large 3-dB fractional bandwidth of 14.74% is achieved, as well as a low temperature coefficient of frequency of approximately −18 ppm/°C. This research proposes a useful solution for high-performance filters in fifth-generation networks.