Monolithic 1–6-Ghz Multiband Acoustic Filters Using SH-SAW and LLSAW on LiNbO$_{3}$/SiO$_{2}$/SiC Platform
Peisen Liu,Sulei Fu,Rongxuan Su,Huiping Xu,Boyuan Xiao,Xinchen Zhou,Shuai Zhang,Rui Wang,Cheng Song,Fei Zeng,Weibiao Wang,Feng Pan
DOI: https://doi.org/10.1109/tmtt.2024.3383476
IF: 4.3
2024-01-01
IEEE Transactions on Microwave Theory and Techniques
Abstract:This work presents a novel LiNbO3/SiO2/SiC piezoelectric-on-insulator (POI) platform for monolithic synthesis of high-performance, multiband, and compact surface acoustic wave (SAW) filters on a single die. By means of the frequency tunability of SAW technology, simultaneous excitation of shear horizontal (SH)-SAW and longitudinal leaky SAW (LLSAW)modes that possess different velocities makes possible envisioning scalable operation frequencies (1-6 GHz). After systematical simulation, optimized 32 degrees Y-LiNbO3(300 nm)/SiO2(200 nm)/SiC structure exhibits outstanding capabilities in delivering wide-band, low-loss, and thermally stable devices. The implemented resonators show scalable resonance from 1.15 to 5.71 GHz, where a typical SH-SAW resonator exhibits a large electro mechanical coupling factor (k(eff)(2)) of 24.7%, a maximum quality facto (Bode-Q(max)) of 1300, and an excellent temperature coefficient of frequency (TCF) of-14 ppm/degrees C, while the LLSAW resonator demonstrates a decent k(eff)(2) of 14.0%, a Bode-Q(max) of 1000, and a figure of merit of 138. The fabricated filters show diverse center frequencies (f(c)) ranging from 1.77 to 5.6 GHz, 3-dB fractional bandwidths (FBWs) between 5.68% and 16.41%, a minimum insertion loss (IL) between 0.37 and 1.79 dB, an out-of-band(OoB) rejection above 25 dB, and a TCF of f(c) between-10 and-58 ppm/C-degrees. This work potentially provides a cost-effective multiband filtering solution for 5G applications