Investigation of Selectively Forming Nano-Porous Silicon for the Application of MEA

WANG Wen-jing,WANG Xiao-hong,JIANG Yin-qi,HU Xiao-long,LIU Li-tian
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.044
2006-01-01
Abstract:Study of the formation of porous silicon is performed. The porous wafers are produced by deep anodic etching which is a very effective and cheap fabrication method compatible to standard Si CMOS fabrication technology. The density of nano- (and micro-) pores can be varied in a wide range by choice of substrate doping level and appropriate electrolyte solution. Therefore the nano-porous silicon membrane is obtained, demonstrating the possibility of the use of nano-porous silicon as a proton electrolytic membrane (PEM) material for micro-fuel cell applications.
What problem does this paper attempt to address?