Design of Μpemfc Fabricated with Porous Silicon

王晓红,谢克文,周俊,刘理天
DOI: https://doi.org/10.3969/j.issn.1674-4926.2003.z1.044
2003-01-01
Chinese Journal of Semiconductors
Abstract:A novel material porous silicon is used as diffusion layer in pPEMFC (micro proton eXchange membrane fuel cells) for its loose and porous structure and compatibility with IC process. Study of the formation of porous silicon and metal sputter deposition on the porous silicon is performed. A fabrication process of pPEMFC based on the technology of MEMS and film deposition is presented.
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