Progress in Research and Development of Metal Nanocrystal Memories

ZHANG Min,DING Shi-jin,CHEN Wei,ZHANG Wei
DOI: https://doi.org/10.3969/j.issn.1004-3365.2007.03.016
2007-01-01
Abstract:Metal nanocrystals possess various advantages,such as high density states,a wide range of work functions,as well as no multidimensional carrier confinement effects etc,indicating that metal nanocrystal memories are very promising for next generation flash memory applications.In this article,developments of metal nanocrystal memories in recent years are summarized,including the principle of metal nanocrystal memory,techniques for metal nanocrystal formation,new dielectric materials and charge trapping layer structure and so on.
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