An Analytical 2-D Threshold Voltage Model for Strained PMOS

SU Lina,ZHOU Dong,GU Xiaofeng
DOI: https://doi.org/10.3969/j.issn.1004-3365.2012.03.028
2012-01-01
Abstract:An analytical two-dimensional(2-D) threshold voltage model for uniaxially strained PMOS with SiGe source/drain(S/D) structure was established by solving 2-D Poisson's equation using quasi-2-D method.Theoretical calculation results were in good agreement with the reported experimental data.Channel surface potentials at different channel lengths and drain voltages were investigated,and effects of channel length,drain voltage and germanium molar fraction of SiGe S/D on threshold voltage were analyzed.Simulation using TCAD tools indicated that the channel length and drain voltage were major factors for threshold voltage drift,while in a certain composition range,the molar fraction of Ge showed relatively smaller effect on threshold voltage of uniaxially strained PMOS transistors.
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