Cathodoluminescence and positron annihilation of defects in diamond films formed by d.c. plasma CVD

Zhen-Gang Zhang,Ke-Jun Liao,Wan-Lu Wang
DOI: https://doi.org/10.1016/0040-6090(95)06823-6
IF: 2.1
1995-01-01
Thin Solid Films
Abstract:Cathodoluminescence spectroscopy and the positron-annihilation technique are used to examine the defects in the diamond films formed by d.c. plasma chemical vapour deposition. Experimental results show that different types of defects exist in diamond films.
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