Abstract:Integrating transducer/sensing materials into microfluidic platforms has enhanced gas sensors' sensitivity, selectivity, and response time while facilitating miniaturization. In this manuscript, microfluidics has been integrated with non-planar microelectrode array and functionalized ionic liquids (ILs) to develop a novel miniaturized electrochemical gas sensor architecture. The sensor employs the IL 1-ethyl-3-methylimidazolium 2-cyanopyrolide ([EMIM][2-CNpyr]) as the electrolyte and capture molecule for detecting carbon dioxide (CO2 ). The three-layer architecture of the sensor consists of a microchannel with the IL sandwiched between glass slides containing microelectrode arrays, forming a non-planar structure. This design facilitates electric field penetration through the IL, capturing CO2 binding perturbations throughout the channel volume to enhance sensitivity. CO 2 binding with [EMIM][2-CNpyr] generates carboxylate ([EMIM]+ -CO2- ]), carbamate ([2-CNpyr]-CO2- ]), and pyrrole-2-carbonitrile (2CNpyrH) species, significantly decreasing the conductivity. The viscosity is also increased, leading to a further decrease in conductivity. These cumulative effects increase charge transfer resistance in the impedance spectrum, allowing a linear calibration curve obtained using Langmuir Isotherm. The sensitivity and reproducibility in CO2 detection are demonstrated by two electrode configurations using the calibration curve. The developed sensor offers a versatile platform for future applications.

Fabrication of microcoil/microsprings for novel chemical and biological sensing

Fabrication of SiO $_{2}$ Microcantilever Using Isotropic Etching With ICP

Spiral Springs and Microspiral Springs for Chemical and Biological Sensing

Fabrication and characterization of SiO2 microcantilever for microsensor application

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Simulation and Fabrication of SiO2-based Piezoresistive Microbridges for Chem/biosensors

Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

Dielectrophoresis of Nano-Materials and Application to Fabrication of Micro-/Nano-Sensor

Electroplating Cobalt Films on Silicon Nanostructures for Sensing Molecules

Fabrication and Detection of Microvalves for Spr Array Sensing

Ionic Liquid-Packed Microfluidic Device with Non-Planar Microelectrode as a Miniaturized Electrochemical Gas Sensor

Silicon Dioxide Microcantilever With Piezoresistive Element Integrated For Portable Ultraresoluble Gaseous Detection

Fabrication of a chemosensor array on a microfluidic device by a simple gel-based method

Process for the fabrication of complex three-dimensional microcoils in fused silica.

Fabrication and Biosensing with Cnt/Aligned Mesostructured Silica Core-Shell Nanowires

Microfabrication of chamber-type microchips and its applications for chemical sensors

High-level Integration of Three-Dimensional Microcoils Array in Fused Silica

Fabrication of Submicron-Gap Electrodes by Silicon Volume Expansion for DNA-detection

Fabrication of Gas Sensor Based on Field Ionization from Swcnts with Tripolar Microelectrode

Bio/chemical Detection in Liquid with Self-Sensing Pr-Oxi-Lever (Piezo-Resistive SiO2 Cantilever) Sensors