Diagnosis for the Parameters of Microwave Argon Plasma Using Emission Spectroscopy at Atmospheric Pressure

XIE Hong-duan,SUN Bing,ZHU Xiao-mei,LIU Yong-jun
DOI: https://doi.org/10.3969/j.issn.1000-1565.2009.03.009
2009-01-01
Abstract:The argon microwave plasma at atmospheric pressure was diagnosed by the method of emission spectra for further comprehending the character of it.The electron excitation temperatures and electron number density was calculated base on Boltzmann Plot method and Stark broadening theory.The distribution of electron excitation temperatures and number density on torch line and the effect of microwave power on the excitation temperatures and number density of electron was investigated.The results indicated that the Argon microwave plasma exhibited electron excitation temperatures of 4 000~6 000 K and the electron number density of(2.4~2.8)×1018 cm-3,the maximum of electron excitation temperatures and electron number density was achieved at the distance of 20 mm from the bottom of waveguide on the torch line.The electron excitation temperatures and electron number density increased alternately with the increase of microwave power.
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