Thermal Properties Measurement of Micro-electromechanical System Sensors by Digital Moiré Method

H. Shang,H. Xie,X. Wang,S. Jiang,F. Dai,W. Wang,Y. Fang,Y. Zhao
DOI: https://doi.org/10.1111/j.1475-1305.2005.00226.x
2005-01-01
Strain
Abstract:The thermal properties of a micro-electromechanical system sensor were analysed by a novel digital moire method. A double-layer micro-cantilever sensor (60 mu m long, 10 mu m width and 2 mu dm thick) was prepared by focused ion beam milling. A grating with frequency of 5000 lines mm(-1) was etched on the cantilever. The sensor was placed into a scanning electron microscope system with a high temperature device. The observation and recording of the thermal deformation of the grating were realised in real-time as the temperature rose from room temperature to 300 degrees C at intervals of 50 degrees C. Digital moire was generated by interference of the deformed grating and a digital virtual grating. The thermal properties including strain distribution of the sensor and the linear expansion coefficient of polysilicon were accurately measured by the phase-shifted moire patterns.
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