Closed loop detection circuit for high Q value accelerometer based on PID feedback

SUN Teng,CHE Lu-feng,LI Xiao-lin,WU Jian
DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.02.032
2011-01-01
Abstract:As high Q value accelerometer has the advantage of reducing thermal-mechanical Brownian noise,it is widely used in high precision low noise measurement field,but the closed loop circuit becomes one of the difficulties for application.With the analysis of the structure and the dynamic response of this kind of accelerometer,a closed loop detection circuit based on PID feedback is presented to over-come the disadvantage effect of high Q value accelerometer.Based on the design theory,a PCB board level circuit is designed for the test.Measurement results indicate that the circuit effectively improves the bandwidth,linearity,dynamic response time of the system.
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