A Novel One Step Integration of Edge-Emitting Laser Diode with Micro-Elliptical Lens Using Focused Ion Beam Direct Deposition

YQ Fu,NKA Bryan
DOI: https://doi.org/10.1109/66.983438
IF: 2.7
2002-01-01
IEEE Transactions on Semiconductor Manufacturing
Abstract:Edge-emitting laser diode (LD) integrated with microlens on its emitting surface for the purpose of collimating and fiber coupling is introduced in detail in this paper. Micro-elliptical lens is adopted for the integration in terms of divergence angle in both directions of parallel and transverse. The lens with dimension of 50 mum X 30 mum X 4 mum is microfabricated on the emitting surface of the laser diode with operating wavelength of 635 nm directly by focused ion beam (FIB) deposition function. The SiO2 deposition is realized by programming of our FIB machine. It is shown by testing results that the focused spot size in the propagation directions of parallel and transverse are 7.9 and 9.1 mum (at site of l/e(2)), respectively, and the coupling efficiency of the compact and miniaturized system can reach as high as 71 %. Measured far-field angle (full angle) with the microlens in both directions of parallel and transverse is 2.2degrees and 1.2degrees, respectively. Compared with the original divergence angle of 311 and 14degrees without the micro-elliptical lens, they were greatly reduced by this method.
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