Study on decoupling inverse control of CMP multi-zones pressure system

Men Yanwu,Lu Xinchun,Zhang Hui,Zhou Kai,Ye Peiqing,Shen Pan
DOI: https://doi.org/10.13245/j.hust.2012.s2.013
2012-01-01
Abstract:To solve the multi-zones′ coupling problem of chemical mechanical polishing,this paper presents a method of multi-zones decoupling control,e.g.offline models identification+neural on-line decoupling+inverse control.Based on on-line real-time dynamic decoupling characteristic of neural,offline identified models and inverse control,the method has the ability of fast response and robustness.Experiment results show that the decoupling control method is feasible,practical and reliable.
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