Decoupled Adaptive Inverse Control of CMP Multi-Zone Pressure Systems Based on DRNN

LU Xin-chun
2012-01-01
Abstract:During chemical mechanical polishing(CMP) process,the flexible elastic diaphragm couples the processes,which makes pressure control more complicated.The coupling is handled by multi-zone decoupled adaptive control using dynamic recurrent neural network(DRNN) online identification+neural decoupling+several-section variable parameter compound control.The nonlinear mapping ability of the neural network gives real-time dynamic decoupling for an inverse model of the object to reduce the coupling effects.The several-section variable parameter compound control not only eliminates the adverse effects of the initial inverse model identification errors and system turbulence,but also stabilizes the entire control system.Tests show that the method can provide online identification and decoupling with strong adaptive ability,fast response,small overshoot,and robustness compared with traditional proportional integral derivative(PID) control.
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