MEMS-based Micro Inertial Measurement Unit

陈义华,王凌云,孙道恒

2005-01-01

Abstract:This paper describes the development and application of MIMU based on MEMS in and out of the country and investigates its fundamental principle and structure.The advantage and disadvantage of MIMU are analyzed,and at the same time the prospect of MIMU is also discussed.

What problem does this paper attempt to address?

Application of MEMS in Inertial Measurement

李志信,罗小兵,过增元

DOI: https://doi.org/10.3969/j.issn.1000-9787.2001.07.019

2001-01-01

Abstract:Application status of MEMS in inertial measurement is summarized, the basic principles of accelerometers and gyroscopes and their commercialization situation are briefly introduced, some ideas about development of micromachined inertial sensor in China are presented.
Design and calibration of MIMU based on chip size micro inertial sensors

Yun Xu,Xinhua Zhu,Yu Wang

DOI: https://doi.org/10.4028/www.scientific.net/AMR.849.302

2014-01-01

Advanced Materials Research

Abstract:With rapid development of micro fabrication technology, the performance of MIMU has gradually improved. The MIMU introduced in this paper is based on the silicon micro machined gyroscope of type MSG7000D and accelerometer of type MSA6000. The volume of it is 3x3x3cm(3), the mass is 68.5g and the power consumption is less than 1w. The experimental result shows that the bias stability of the gyroscope and accelerometer for each axis of the designed MIMU is less than 10 degrees/h and 0.5mg respectively. For the non orthogonality in three axes of the structure, MIMU needs to be calibrated. After calibration, the measurement accuracy has improved by an order of magnitude. The designed MIMU can satisfy the requirement of high performance, low cost, light weight and small size for strap-down navigation system, thus it can be widely applied not only to the field of vehicles integrated navigation, attitude measurement but also to the fields of personal goods such as mobile, game consoles and so on.
Study of GPS/MIMU Integrated Navigation and Location Systems for SUAV

龚真春,李平,宋执环

DOI: https://doi.org/10.3969/j.issn.1006-141x.2004.03.004

2004-01-01

Abstract:Based on the characteristic and the demands for navigation and location to SUAV, a low cost GPS/MIMU integrated navigation system is designed by using MIMU and GPS-OEM panel in this paper. In order to verify the performance of the integrated system, the simulation is implemented by using the actual data measured and observed. The simulation results show that the integrated navigation system can more greatly improve reliability and precision than the single navigation system.
Design of Micro Inertial Measurement Unit Based on Micromachined Thermal Expansion Gas Gyroscope

Wei Jing,Zhu Xinhua,Su Yan

DOI: https://doi.org/10.1109/IMCCC.2013.11

2013-01-01

Abstract:Micro machined Thermal Expansion Gas Gyroscope (MTEGG) based on the principle of thermal expansion is a novel MEMS gyroscope. It is more convenient to use MTEGG to design MIMU, because MTEGG is not only as an angular rate sensor but also as an accelerometer. In this paper, a novel MIMU based on the MTEGG is discussed. The scheme of MTEGG is introduced first, basing on it, the design of detecting & controlling circuits is proposed. Then, the design of MIMU which includes structure design, selection of MCU, data acquisition design, and MCU software design is introduced. In addition, experimental methods of zero-bias stability and scale factor are also introduced. In the end, the designed MIMU based on MTEGG has been tested by experiments. The measurement result of the MIMU show that the zero-bias stability for the angular rate and acceleration of the designed MIMU in x y z axis is 0.9723 mV/(°·s-1), 0.96401 mV/(°·s-1), 0.90556 mV/(°·s-1), 2.568 mg, 2.603 mg, 2.512 mg respectively, while the scale factor of them is 0.541°/s, 0.564°/s, 0.583°/s, 0.72375 mV/g, 0.72301 mV/g, 0.72446 mV/g separately, and the designed MIMU can be used in common navigation field.
Status and development trend of MEMS inertial sensors

Jin Xiaofeng,Li Xiaoyang,Peng Yongqing,W. Weikui,Wang Shouli

Abstract:: Inertial sensors based on MEMS (Micro-Electro-Mechanical System) technology have the advantages of light weight, low cost, small size, etc., they have extremely broad application and development prospects in civil, aerospace and military fields. With the rapid development of MEMS technology, the performance indicators of MEMS inertial sensors have also been significantly improved. The basic working principle, classification and research status of MEMS gyroscope, MEMS accelerometer and MEMS inertial measurement unit (IMU) are sorted out and the development trend of MEMS gyroscope, MEMS accelerometer and MEMS inertial measurement unit are analyzed and forecasted.

Physics,Engineering
Micro Inertial Measurement System

Jh Lan,Zy Zhou,L Li,Dy Tu,Wz Zhao

2002-01-01

Abstract:A micro inertial measurement system based on MEMS technology and its constituting principle are described. In order to realize the measuring position and pose, the coordinate transition, attitude matrix solution, position and pose calculation are studied with corresponding mathematics model and algorithms presented. The experiments are carried out in principle and results of it are given. It is proved that the micro inertial measurement system is effective and correct.
A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems

Jiawei Xuan,Ting Zhu,Gao Peng,Fayou Sun,Dawei Dong

DOI: https://doi.org/10.3390/s24227140

IF: 3.9

2024-11-07

Sensors

Abstract:In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the premise of low cost. This paper reviews the development of MEMS inertial measurement unit (IMU) array technology. First, the different types of common inertial measurement unit arrays are introduced and the basic principles are explained. Secondly, IMU array's development status is summarized by analyzing the research results over the years. Then, the key technologies and corresponding development status of IMU array are described, respectively, including error analysis modeling and calibration, data fusion technology, fault detection, and isolation technology. Finally, the characteristics and shortcomings of the past research results are summarized, the future research direction is discussed, and some thoughts are put forward to further improve the accuracy of the IMU array.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Application of MIMU/magnetometer Integrated System on the Attitude Determination of Micro Satellite

K Su,DH Ren,Z You,Q Zhou

DOI: https://doi.org/10.1109/icima.2004.1384262

2004-01-01

Abstract:Micro Inertial Measurement Unit (MIMU) has given Inertial Measurement Unit (IMU) a widely application respective. In this paper, we study the application of MIMUl magnetometer integrated system on the attitude determination of micro satellite. Based on the principle of MIMU and the` measurement of magnetometer, MIMU/magnetometer system is integrated. Through designing the simulatien models of attitude determination for micro satellite, consisted of< the `SGP4 orbit model, the IGRF model and the satellite dynamic model, we do the simulation research. Simulation results with EKF show that, in 1/3 orbit time, the measurement error of attitude angular is controlled within 0.5 deg, meeting the requirement of the micro satellite attitude determination. In addition, we compare the UKF results with the EKF and find the UKF results converge faster than the EKF while the state estimate precision of the two filters are comparable.
Inertia measure using MEMS gyroscope

王犇,袁涛,谭涛

DOI: https://doi.org/10.3969/j.issn.1008-0570.2008.26.063

2008-01-01

Abstract:MEMS(Micro-Electro-Mechanical system) inertial sensor has been widely used.This paper presents a micro inertia measure system based on a new kind of MEMS gyroscope. The measure system adopts an ADIS16255 gyroscope from ANALOG DIVICES company,it has an high precision,and enables self-calibration.This system is small,light and easy to expand.In this paper,we give the design principles and software flow chart.
Research on the Calibration Method of Micro Inertial Measurement Unit for Engineering Application.

Yun Xu,Yu Wang,Yan Su,Xin-hua Zhu

DOI: https://doi.org/10.1155/2016/9108197

IF: 2.336

2016-01-01

Journal of Sensors

Abstract:With rapid development of micro fabrication technology, the production level of micro inertial devices has increased, which promoted the performance improvement of Micro Inertial Measurement Unit (MIMU). Measurement precision of MIMU is one of the most significant indexes, especially for the application of the guided spinning projectiles. In order to improve the measurement precision of MIMU, this paper presents a novel calibration method. The calibration model is established and the derivation for parameters estimation has been introduced. By the multirate tests and multiposition tests, all the parameters in the calibration model can be well estimated. Verification experiment shows that the proposed method has the same compensation effect as the traditional method, but it can alleviate the computing burden for the system. Thus the proposed method will have a wide application prospect for the future engineering calibration.
A Miniature Integrated Navigation System for Rotary-Wing Unmanned Aerial Vehicles

Yu Xu,Wenda Sun,Ping Li

DOI: https://doi.org/10.1155/2014/748940

IF: 1.4

2014-01-01

International Journal of Aerospace Engineering

Abstract:This paper presents the development of a low cost miniature navigation system for autonomous flying rotary-wing unmanned aerial vehicles (UAVs). The system incorporates measurements from a low cost single point GPS and a triaxial solid state inertial/magnetic sensor unit. The navigation algorithm is composed of three modules running on a microcontroller: the sensor calibration module, the attitude estimator, and the velocity and position estimator. The sensor calibration module relies on a recursive least square based ellipsoid hypothesis calibration algorithm to estimate biases and scale factors of accelerometers and magnetometers without any additional calibration equipment. The attitude estimator is a low computational linear attitude fusion algorithm that effectively incorporates high frequency components of gyros and low frequency components of accelerometers and magnetometers to guarantee both accuracy and bandwidth of attitude estimation. The velocity and position estimator uses two cascaded complementary filters which fuse translational acceleration, GPS velocity, and position to improve the bandwidth of velocity and position. The designed navigation system is feasible for miniature UAVs due to its low cost, simplicity, miniaturization, and guaranteed estimation errors. Both ground tests and autonomous flight tests of miniature unmanned helicopter and quadrotor have shown the effectiveness of the proposed system, demonstrating its promise in UAV systems.
Error Calibration and Compensation of Entire Micro Inertial Measurement Unit

DAI Gang,LI Mei,SU Wei,SHAO Bei-bei

DOI: https://doi.org/10.3788/ope.20111907.1620

2011-01-01

Abstract:The entire calibration and compensation method of a Miniature Inerial Measurement Unit(MIMU) in high dynamic and overload complicate environments was proposed. Firstly,an error model applied to the complicate application environments was established,which consists of the structure errors,installation misalignment errors and the errors of the MEMS sensors including zero output drift,temperature drift,cross-axis error,nonlinear scale factor error and acceleration effect error of gyroscope.Based on the model,the entire calibration and compensation method was proposed to calibrate 63 error coefficients without calibration of each MEMS inertial sensor separately.Then,the generalized least square algorithm was used to calibrate and calculate the error coefficients.Finally,a MIMU was developed for a flight experiment and was calibrated with this proposed method.Experimental results indicate that the positioning accuracy is improved by 1 order of magnitude.It can satisfy the high dynamic and overload requirements of the MIMU.
Research on Integrated Navigation System of Small UAV Based on MEMS Sensor

Pinghui Wang,Siliang Bai,Wang Sun,Song Han

DOI: https://doi.org/10.1109/ISSTC59603.2023.10281098

2023-08-11

Abstract:This paper uses inertial sensor-based inertial navigation system to loosely integrate with satellite navigation systems based on Beidou and GPS to construct an integrated navigation system. The navigation prototype is designed and manufactured. Data fusion between the two navigation systems is accomplished by Kalman filter algorithm. According to the precision condition of MEMS sensor, inertial navigation system mechanization and error model are established. Compared with the industrial integrated navigation system, the experimental results show that the navigation system designed in this paper has good static and dynamic measurement accuracy.

Engineering
One Single Chip Micro Inertial Measurement Unit

CHANG Hong-long,JIANG Qing-hua,CUI Jin-qiang,LI Qian,YUAN Wei-zheng,YANG Fang

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.247

2006-01-01

Abstract:This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromachining process such as dissolved wafer process. The length and width of lateral gaps between the different structure patterns were adjusted to be as similar as possible through comprehensive optimization of the six sensing structures, thus the deep reactive ion etching lag effect could hardly affect the geometry of the structure. The sample chip integrated six inertial sensors, i.e. the X-axis,Y-axis and Z-axis accelerometers and gyroscopes, on one area which was smaller than 1 cm~2. The test results showed that the gyroscopes' bias stability could reach 1 degree per second and the accelerometers' scale factor was about 33 mV/g_n. The study result of the paper proves the feasibility of the simple integration method, which could greatly reduce the size of inertial measure unit.
MEMS strapdown inertial attitude measurement system using rotational modulation technology

Wei Sun,Heng Huang,Peilun Sun,Wei Ding

DOI: https://doi.org/10.1371/journal.pone.0298168

IF: 3.7

2024-02-14

PLoS ONE

Abstract:Attitude determination involves the integration of methodologies and systems for estimating the time varying attitude of moving objects. Strapdown Inertial Attitude Measurement System (SIAMS) is among the most widely used navigation systems. The development of cost effective Micro Electro Mechanic System (MEMS) based inertial sensors has made attitude measurement system more affordable. However, MEMS sensors suffer from various errors that have to be calibrated and compensated to get acceptable attitude results. Given the auto-compensation of inertial sensor bias in rotation error modulation, the objective of this paper is to develop a MEMS-based rotary SIAMS, in which the significant sensor bias is automatically compensated by rotating the IMU, to offer comparable performance with respect to a tactical-grade Inertial Measurement Unit (IMU). With the analysis of the relationship between the MEMS error and misalignment, a MEMS calibration model is derived, and a combined calibration method of multi position rotation is applied to estimate the deterministic sensor errors such as bias, scale factor, and misalignment. Simulation and experiment results indicate that the proposed method can further modulate and compensate the MEMS errors, thereby improving the MEMS attitude accuracy.

multidisciplinary sciences
Design and Simulation Analysis on Vibration Attenuation Structure of MIMU

Jing Zhao

2012-01-01

Abstract:The performance of a micro inertial measurement unit(MIMU) based on resonant gyroscope is influenced by external and internal vibration interference.On the basis of analyzing vibration sources and disadvantages of traditional vibration attenuation methods,a new damping solution based on damping alloy and design of MIMU structure is proposed.Simulation experiments are designed to analyze the mechanical properties and damping attenuation characteristics.Results show that the solution based on damping alloy can meet requirements of the system,and it has good vibration attenuation and anti-interference ability.
Design of Mini IMS Based on DSP

CHEN An-ning,CHEN Qing-song,LI Ping,HAN Bo

DOI: https://doi.org/10.3969/j.issn.1001-4551.2006.01.001

2006-01-01

Abstract:The developing of the MEMS technology makes it possible of the widely use of mini inertial measurement systems(IMS),which in return promotes the research of the low-cost IMS.This paper introduces a mini IMS which employs DSP TMS320LF2407 as its central processor,including the hardware structure and the software scheme.And the test result from the prototype system was present.Compared with most of the current IMSs,this system features minimized weight and size,reduced power wastage,better extensibility and low cost.
Applications of MEMS Devices in Nanosatellite

Z You,B Li,SJ Yu,GF Zhang

DOI: https://doi.org/10.1109/rast.2005.1512569

2012-01-01

Engineering Sciences

Abstract:MEMS (Micro Electro-Mechanical System) device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smaller nanosatellites with higher performance and longer lifecycle. The power cost of MEMS device is usually much lower than traditional devices, which will greatly reduce the consumption of power. For its small size and simple architecture, MEMS devices can be easily integrated together and achieve redundancy. Launched on 18 April, 2004, NS-1 is a nanosatellite for science exploration and MEMS devices test. A mass of science data and images were acquired during its running. NS-1 weights less than 25 Kg. It consists of several MEMS devices, including one MIMU, three micro CMOS cameras, one sun sensor, three momentum wheels and one micro magnetic sensor. By applying micro components based on MEMS technology, NS-1 made success in the experiments of integrative design, manufacture, and MEMS devices integration. In this paper, some MEMS devices for nanosatellite and picosatellite are introduced, which have been tested on the NS-1 nanosatellite or on ground.
Design and Fabrication for Inertial Micro Sensors

GY Wu,ZX Xiao,ZH Li,YL Hao

DOI: https://doi.org/10.1109/icsict.1998.786512

1998-01-01

Abstract:This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.
A Novel Approach for Attitude Estimation Using Mems Inertial Sensors

Zheming Wu,Zhenguo Sun,Wenzeng Zhang,Qiang Chen

DOI: https://doi.org/10.1109/icsens.2014.6985177

2014-01-01

Abstract:In this paper a new method for attitude estimation using low-cost MEMS inertial sensors is developed, in order to obtain accurate attitude parameters when other external sensors such as magnetometer and GPS are limited in operation. The method is based on specific rotation of the inertial measurement unit independent from rigid body motion. An algorithm is developed by incorporating a nonlinear observer in order to fusing measurements from both the gyroscope and the accelerometers. The algorithm provides bias estimation of the gyroscope and better estimation results. Experiments validate the effectiveness of the proposed method.

MEMS-based Micro Inertial Measurement Unit

Application of MEMS in Inertial Measurement

Design and calibration of MIMU based on chip size micro inertial sensors

Study of GPS/MIMU Integrated Navigation and Location Systems for SUAV

Design of Micro Inertial Measurement Unit Based on Micromachined Thermal Expansion Gas Gyroscope

Status and development trend of MEMS inertial sensors

Micro Inertial Measurement System

A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems

Application of MIMU/magnetometer Integrated System on the Attitude Determination of Micro Satellite

Inertia measure using MEMS gyroscope

Research on the Calibration Method of Micro Inertial Measurement Unit for Engineering Application.

A Miniature Integrated Navigation System for Rotary-Wing Unmanned Aerial Vehicles

Error Calibration and Compensation of Entire Micro Inertial Measurement Unit

Research on Integrated Navigation System of Small UAV Based on MEMS Sensor

One Single Chip Micro Inertial Measurement Unit

MEMS strapdown inertial attitude measurement system using rotational modulation technology

Design and Simulation Analysis on Vibration Attenuation Structure of MIMU

Design of Mini IMS Based on DSP

Applications of MEMS Devices in Nanosatellite

Design and Fabrication for Inertial Micro Sensors

A Novel Approach for Attitude Estimation Using Mems Inertial Sensors