Abstract:This work modified some parameters related to the bond order in REBO-II of the C-C interaction and simulated the ta-C:Al film deposition using the large-scale atomic/molecular massively parallel simulator especially focused on the effect of the Al-doping content on the microstructural and mechanical properties of tetrahedral amorphous carbon films. According to the Al existence state, the Al content in the films can be divided into three ranges: range I -under 5 at % Al, a single Al atom or a small cluster with 2-3 Al atoms disperses separately in the matrix; range II -at 5-20 at. % Al, the number and incorporating Al atoms of the clusters increase with the Al content; range III above 20 at. % Al, only a solid network of aluminum atoms forms, which becomes thickened and densified with Al content increment. The existence states of Al atoms play an essential role in determining mechanical and structural properties. With Al content increasing in the films, the isolated small cluster of atoms evolved into a whole network of aluminum inter-crossing with the C-network. With the evolution of Al existence states, the sp3C fraction decreases monotonically, while the sp2C fraction increases. In range III, the network of aluminum promotes the growth of sp1C sites. The residual compressive stress in the film decreased rapidly with the Al content increasing in range I and II, but it reached a low-level constant value in range III.

A Comparative Raman Study of Thermal Stability of Amorphous Diamond Films Deposited with Different Substrate Bias

Optical Properties of Amorphous Diamond Films Evaluated by Non-Destructive Spectroscopic Ellipsometry

Temperature-Dependence of Microstructural Properties of Amorphous Diamond Films

C 1s Photoemission Investigation of Substrate Bias and Annealing Temperature Influencing the Microstructure of Amorphous Diamond Films

Temperature Sensibility of Amorphous Diamond Films Prepared by Filtered Arc

Optical and Electronic-Properties of Amorphous Diamond

Synthesis, structure and applications of amorphous diamond

Substrate Bias Effect on Structure of Tetrahedral Amorphous Carbon Films by Raman Spectroscopy

Mechanical properties and Raman characterization of amorphous diamond films as a function of film thickness

Optical-Properties of Amorphous C/Diamond Thin-Films

Influence of Dc Bias Voltage on the Refractive-Index and Stress of Carbon-Diamond Films Deposited from A Ch4/Ar Rf Plasma

Superexcellent Infrared Protective Coatings : Amorphous Diamond Films Deposited by Filtered Cathodic Vacuum Arc Technology

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Spectroscopic Ellipsometry Investigations of Amorphous Diamond Films Deposited with Filtered Arc

Residual Stresses And Debonding Of Diamond Films On Titanium Alloy Substrates

Micro-Raman Analysis of the Cross-Section of a Diamond Film Prepared by Hot-Filament Chemical Vapor Deposition

Structure and mechanical properties of diamondlike carbon films produced by hollow-cathode plasma deposition

Comparative spectroscopic studies of MOCVD grown AlN films on Al2O3 and 6H–SiC

THERMAL-SENSITIVE CHARACTERISTICS OF BORON-DOPED DIAMOND FILMS

Evolution of the Microstructure, Hybridization, and Internal Stress of Al-Doped Diamond-Like Carbon Coatings: A Molecular Dynamics Simulation

Comparison of Heteroepitaxial Diamond Nucleation and Growth on Roughened and Flat Ir/SrTiO3 Substrates