Spectroscopic Ellipsometry Investigations of Amorphous Diamond Films Deposited with Filtered Arc

Jiaqi Zhu,Jiecai Han,Yong Tao,Cui Jiang

2006-01-01

Abstract:In order to investigate thoroughly the optical properties of amorphous diamond (alpha-D) films deposited by the filtered vacuum arc technology, the optical constants of the films were measured by spectroscopic ellipsometry. Moreover, the dispersion relations of the optical constants, and the correlations among refractive index, extinction coefficient, optical gap and the substrate bias were also analyzed. It has been shown that the refractive index of alpha-D films is higher than that of diamond crystal, and the absorption edge corresponding to the interband transformation can be described with the parabolic line shape. With increasing the wavelength, the extinction coefficient gradually declines and approaches nearly to zero in the infrared band. In addition, the adjustable amplitudes of the optical constants owing to the changing bias also reduce strikingly with the extension of the wavelength. With raising the bias, the refractive index and the optical gap firstly augment, then minish, and there is a maximal value when the substrate bias is -80 V. However, the extinction coefficient firstly minishes, then augments, and there is a minimal value when the bias is -80 V.