Abstract:A femtosecond laser direct writing approach for fabricating metallic micropatterns on transparent substrates is developed. It is proved that high‐efficiency, low‐intensity threshold, and low‐thermal damage are achieved simultaneously via single‐photon absorption by photosensitive particles and excellent heat‐input regulation of femtosecond laser. Both experiment and simulation are used to demonstrate the advantages and mechanism of the proposed method. Laser direct writing (LDW) is a promising approach for fabricating metallic micropatterns on transparent substrates for transparent electronic circuits that satisfy both electronic and optical criteria. However, high efficiency and precision patterning remain a challenge for both photochemical and photothermal LDW. Here, a novel method is proposed with a femtosecond laser to achieve a highly‐efficient photothermal process via single‐photon absorption by photosensitive particles (SPA‐FsLDW). The dispersive photosensitive particles act as numerous heating sources, enabling simultaneous multiple‐location photothermal reactions and highly‐efficient metallization due to heat‐induced metal ion reduction. The new approach effectively exploits the excellent heat‐input regulation with the ultrashort pulse of the femtosecond laser to achieve great temperature controllability and precision. It is shown that, with a deposition rate of ≈107 μm3 s−1 and electrical resistivity of ≈10−7 Ω m, SPA‐FsLDW improves efficiency and electrical resistivity by at least one order of magnitude compared to previously reported FsLDW. A self‐powered sensor is fabricated using SPA‐FsLDW, demonstrating its practical applicability.

Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating.

Mask-Free Patterning of High-Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses

Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Nanoscale Laser Metallurgy and Patterning in Air Using MOFs.

Ultrafast Laser-Induced Thickness-Limited Sintering of Metal Nanoparticle Film for Ultrathin Flexible Microelectronic Devices

Controlled Plasmonic Nanowelding of Metal Nanoparticles under Ultrafast Laser Irradiation for Printable Nanocircuits

Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: from Fabrication Strategies to Future Applications

Controllable Assembly of Silver Nanoparticles Induced by Femtosecond Laser Direct Writing

Nanoscale Tensile Stress Approach for the Direct Writing of Plasmonic Nanostructures.

Fabrication of Embedded Submicron Metal Lines on Glass Surfaces

High‐Efficiency and Low‐Intensity Threshold Femtosecond Laser Direct Writing of Precise Metallic Micropatterns on Transparent Substrate

Laser patterning of conductive gold micronanostructures from nanodots.

Three-dimensional silver nanowiring by femtosecond laser-induced photoreduction from solution

Plasmonic Nanostructuring Through Direct Laser Interference Patterning

Femtosecond laser printing patterned nanoparticles on flexible substrate by tuning plasmon resonances via polarization modulation

Self-Limited Ultraviolet Laser Sintering of Liquid Metal Nanoparticles for Ultrathin, Flexible Electromagnetic Functional Device

One-step Plasmonic Welding and Photolithographic Patterning of Silver Nanowire Network by UV-programable Surface Atom Diffusion

Mask-free, vacuum-free fabrication of high-conductivity metallic nanowire by spatially shaped ultrafast laser (Conference Presentation)

Surface-Plasmon-Mediated Programmable Optical Nanofabrication of an Oriented Silver Nanoplate

Nanoscale Material Redistribution Induced by Spatially Modulated Femtosecond Laser Pulses for Flexible High-Efficiency Surface Patterning.

Highly-facile template-based selective electroless metallization of micro- and nanopatterns for plastic electronics and plasmonics